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dc.creatorĐurić, Zoran G.
dc.creatorRanđelović, Danijela
dc.creatorKrstajić, Predrag
dc.creatorJokić, Ivana
dc.creatorDjukic, M.
dc.date.accessioned2019-01-30T17:26:47Z
dc.date.available2019-01-30T17:26:47Z
dc.date.issued2011
dc.identifier.issn1877-7058
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/833
dc.description.abstractWe developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a sensor using the general theory of microcantilever based resonators. The stress in the microcantilever is a result of the combined effect of the room temperature built-in stress stemming from the fabrication process and the thermal stress caused by the beam heating. We derive for the first time the analytical expressions for basic parameters, sensitivity, noise and detectivity, of such a sensor.en
dc.publisherElsevier
dc.relationinfo:eu-repo/grantAgreement/EC/FP7/205533/EU//
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsopenAccess
dc.sourceEurosensors Xxv
dc.subjectIR detectoren
dc.subjectmicrocantileveren
dc.subjectoscillatoren
dc.subjectdetectivityen
dc.subjectthermal stressen
dc.titleTheory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependenceen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractЈокић, Ивана; Ђурић, Зоран Г.; Дјукиц, М.; Ранђеловић, Данијела; Крстајић, Предраг;
dc.citation.volume25
dc.citation.other25:
dc.identifier.doi10.1016/j.proeng.2011.12.095
dc.identifier.rcubConv_2741
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs//bitstream/id/9429/831.pdf
dc.identifier.scopus2-s2.0-84857180277
dc.identifier.wos000300512400092
dc.type.versionpublishedVersion


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