Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence
Abstract
We developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a sensor using the general theory of microcantilever based resonators. The stress in the microcantilever is a result of the combined effect of the room temperature built-in stress stemming from the fabrication process and the thermal stress caused by the beam heating. We derive for the first time the analytical expressions for basic parameters, sensitivity, noise and detectivity, of such a sensor.
Keywords:
IR detector / microcantilever / oscillator / detectivity / thermal stressSource:
Eurosensors Xxv, 2011, 25Publisher:
- Elsevier
Funding / projects:
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
DOI: 10.1016/j.proeng.2011.12.095
ISSN: 1877-7058
WoS: 000300512400092
Scopus: 2-s2.0-84857180277
Collections
Institution/Community
IHTMTY - CONF AU - Đurić, Zoran G. AU - Randjelović, Danijela AU - Krstajić, Predrag AU - Jokić, Ivana AU - Djukic, M. PY - 2011 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/833 AB - We developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a sensor using the general theory of microcantilever based resonators. The stress in the microcantilever is a result of the combined effect of the room temperature built-in stress stemming from the fabrication process and the thermal stress caused by the beam heating. We derive for the first time the analytical expressions for basic parameters, sensitivity, noise and detectivity, of such a sensor. PB - Elsevier C3 - Eurosensors Xxv T1 - Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence VL - 25 DO - 10.1016/j.proeng.2011.12.095 ER -
@conference{ author = "Đurić, Zoran G. and Randjelović, Danijela and Krstajić, Predrag and Jokić, Ivana and Djukic, M.", year = "2011", abstract = "We developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a sensor using the general theory of microcantilever based resonators. The stress in the microcantilever is a result of the combined effect of the room temperature built-in stress stemming from the fabrication process and the thermal stress caused by the beam heating. We derive for the first time the analytical expressions for basic parameters, sensitivity, noise and detectivity, of such a sensor.", publisher = "Elsevier", journal = "Eurosensors Xxv", title = "Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence", volume = "25", doi = "10.1016/j.proeng.2011.12.095" }
Đurić, Z. G., Randjelović, D., Krstajić, P., Jokić, I.,& Djukic, M.. (2011). Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence. in Eurosensors Xxv Elsevier., 25. https://doi.org/10.1016/j.proeng.2011.12.095
Đurić ZG, Randjelović D, Krstajić P, Jokić I, Djukic M. Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence. in Eurosensors Xxv. 2011;25. doi:10.1016/j.proeng.2011.12.095 .
Đurić, Zoran G., Randjelović, Danijela, Krstajić, Predrag, Jokić, Ivana, Djukic, M., "Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence" in Eurosensors Xxv, 25 (2011), https://doi.org/10.1016/j.proeng.2011.12.095 . .