Prikaz osnovnih podataka o dokumentu
Intelligent thermopile-based vacuum sensor
dc.creator | Randjelović, Danijela | |
dc.creator | Frantlović, Miloš | |
dc.creator | Miljkovic, B. | |
dc.creator | Rosandic, B. | |
dc.creator | Jakšić, Zoran | |
dc.creator | Popović, Bogdan | |
dc.date.accessioned | 2019-01-30T17:26:42Z | |
dc.date.available | 2019-01-30T17:26:42Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 1877-7058 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/832 | |
dc.description.abstract | We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors. | en |
dc.publisher | Elsevier | |
dc.relation | info:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS// | |
dc.relation | info:eu-repo/grantAgreement/EC/FP7/205533/EU// | |
dc.rights | openAccess | |
dc.source | Eurosensors Xxv | |
dc.subject | vacuum sensor | en |
dc.subject | intelligent sensor | en |
dc.subject | thermopile | en |
dc.subject | pressure measurement | en |
dc.title | Intelligent thermopile-based vacuum sensor | en |
dc.type | conferenceObject | |
dc.rights.license | ARR | |
dcterms.abstract | Франтловић, Милош; Ранђеловић, Данијела; Росандиц, Б.; Миљковиц, Б.; Поповић, Богдан; Јакшић, Зоран; | |
dc.citation.volume | 25 | |
dc.citation.other | 25: | |
dc.identifier.doi | 10.1016/j.proeng.2011.12.143 | |
dc.identifier.fulltext | https://cer.ihtm.bg.ac.rs//bitstream/id/9428/830.pdf | |
dc.identifier.scopus | 2-s2.0-84857184202 | |
dc.identifier.wos | 000300512400140 | |
dc.type.version | publishedVersion |