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dc.creatorRanđelović, Danijela
dc.creatorFrantlović, Miloš
dc.creatorMiljkovic, B.
dc.creatorRosandic, B.
dc.creatorJakšić, Zoran
dc.creatorPopović, Bogdan
dc.date.accessioned2019-01-30T17:26:42Z
dc.date.available2019-01-30T17:26:42Z
dc.date.issued2011
dc.identifier.issn1877-7058
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/832
dc.description.abstractWe report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.en
dc.publisherElsevier
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.relationinfo:eu-repo/grantAgreement/EC/FP7/205533/EU//
dc.rightsopenAccess
dc.sourceEurosensors Xxv
dc.subjectvacuum sensoren
dc.subjectintelligent sensoren
dc.subjectthermopileen
dc.subjectpressure measurementen
dc.titleIntelligent thermopile-based vacuum sensoren
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractФрантловић, Милош; Ранђеловић, Данијела; Росандиц, Б.; Миљковиц, Б.; Поповић, Богдан; Јакшић, Зоран;
dc.citation.volume25
dc.citation.other25:
dc.identifier.doi10.1016/j.proeng.2011.12.143
dc.identifier.rcubConv_2742
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs//bitstream/id/9428/830.pdf
dc.identifier.scopus2-s2.0-84857184202
dc.identifier.wos000300512400140
dc.type.versionpublishedVersion


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