Modelling of thermopile-based MEMS sensors using analytical and numerical techniques

dc.creator	Randjelović, Danijela
dc.creator	Tsamis, C.
dc.creator	Kaltsas, G.
dc.creator	Petropoulos, A.
dc.creator	Lazić, Žarko
dc.date.accessioned	2019-01-30T17:25:06Z
dc.date.available	2019-01-30T17:25:06Z
dc.date.issued	2010
dc.identifier.uri	https://cer.ihtm.bg.ac.rs/handle/123456789/756
dc.description.abstract	In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.	en
dc.relation	info:eu-repo/grantAgreement/MESTD/MPN2006-2010/11025/RS//
dc.relation	info:eu-repo/grantAgreement/MESTD/MPN2006-2010/11027/RS//
dc.rights	restrictedAccess
dc.source	27th International Conference on Microelectronics, MIEL 2010 - Proceedings
dc.title	Modelling of thermopile-based MEMS sensors using analytical and numerical techniques	en
dc.type	conferenceObject
dc.rights.license	ARR
dcterms.abstract	Тсамис, Ц.; Калтсас, Г.; Лазић, Жарко; Петропоулос, A.; Ранђеловић, Данијела;
dc.citation.spage	217
dc.citation.epage	220
dc.citation.other	: 217-220
dc.identifier.doi	10.1109/MIEL.2010.5490495
dc.identifier.scopus	2-s2.0-77955214897
dc.type.version	publishedVersion