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dc.creatorRanđelović, Danijela
dc.creatorTsamis, C.
dc.creatorKaltsas, G.
dc.creatorPetropoulos, A.
dc.creatorLazić, Žarko
dc.date.accessioned2019-01-30T17:25:06Z
dc.date.available2019-01-30T17:25:06Z
dc.date.issued2010
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/756
dc.description.abstractIn this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.en
dc.relationinfo:eu-repo/grantAgreement/MESTD/MPN2006-2010/11025/RS//
dc.relationinfo:eu-repo/grantAgreement/MESTD/MPN2006-2010/11027/RS//
dc.rightsrestrictedAccess
dc.source27th International Conference on Microelectronics, MIEL 2010 - Proceedings
dc.titleModelling of thermopile-based MEMS sensors using analytical and numerical techniquesen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractТсамис, Ц.; Калтсас, Г.; Лазић, Жарко; Петропоулос, A.; Ранђеловић, Данијела;
dc.citation.spage217
dc.citation.epage220
dc.citation.other: 217-220
dc.identifier.doi10.1109/MIEL.2010.5490495
dc.identifier.rcubConv_4245
dc.identifier.scopus2-s2.0-77955214897
dc.type.versionpublishedVersion


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