Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
Samo za registrovane korisnike
2010
Konferencijski prilog (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.
Izvor:
27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010, 217-220Finansiranje / projekti:
- Inteligentni industrijski transmiteri na bazi sopstvenih IHTM senzora (RS-MESTD-MPN2006-2010-11025)
- Mikrosistemske, nanosistemske tehnologije i komponente (RS-MESTD-MPN2006-2010-11027)
Institucija/grupa
IHTMTY - CONF AU - Randjelović, Danijela AU - Tsamis, C. AU - Kaltsas, G. AU - Petropoulos, A. AU - Lazić, Žarko PY - 2010 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/756 AB - In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved. C3 - 27th International Conference on Microelectronics, MIEL 2010 - Proceedings T1 - Modelling of thermopile-based MEMS sensors using analytical and numerical techniques SP - 217 EP - 220 DO - 10.1109/MIEL.2010.5490495 ER -
@conference{ author = "Randjelović, Danijela and Tsamis, C. and Kaltsas, G. and Petropoulos, A. and Lazić, Žarko", year = "2010", abstract = "In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.", journal = "27th International Conference on Microelectronics, MIEL 2010 - Proceedings", title = "Modelling of thermopile-based MEMS sensors using analytical and numerical techniques", pages = "217-220", doi = "10.1109/MIEL.2010.5490495" }
Randjelović, D., Tsamis, C., Kaltsas, G., Petropoulos, A.,& Lazić, Ž.. (2010). Modelling of thermopile-based MEMS sensors using analytical and numerical techniques. in 27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 217-220. https://doi.org/10.1109/MIEL.2010.5490495
Randjelović D, Tsamis C, Kaltsas G, Petropoulos A, Lazić Ž. Modelling of thermopile-based MEMS sensors using analytical and numerical techniques. in 27th International Conference on Microelectronics, MIEL 2010 - Proceedings. 2010;:217-220. doi:10.1109/MIEL.2010.5490495 .
Randjelović, Danijela, Tsamis, C., Kaltsas, G., Petropoulos, A., Lazić, Žarko, "Modelling of thermopile-based MEMS sensors using analytical and numerical techniques" in 27th International Conference on Microelectronics, MIEL 2010 - Proceedings (2010):217-220, https://doi.org/10.1109/MIEL.2010.5490495 . .