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dc.creatorĐurić, Zoran G.
dc.creatorJokić, Ivana
dc.creatorDjukic, Maja M.
dc.creatorFrantlović, Miloš
dc.date.accessioned2019-01-30T17:24:35Z
dc.date.available2019-01-30T17:24:35Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/733
dc.description.abstractThis paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.en
dc.publisherElsevier Science Bv, Amsterdam
dc.relationinfo:eu-repo/grantAgreement/EC/FP7/205533/EU//
dc.rightsrestrictedAccess
dc.sourceMicroelectronic Engineering
dc.subjectMultilayer adsorptionen
dc.subjectAdsorption-desorption noiseen
dc.subjectMEMS/NEMS sensorsen
dc.subjectMEMS/NEMS resonant structuresen
dc.titleFluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorptionen
dc.typearticle
dc.rights.licenseARR
dcterms.abstractФрантловић, Милош; Јокић, Ивана; Дјукиц, Маја М.; Ђурић, Зоран Г.;
dc.citation.volume87
dc.citation.issue5-8
dc.citation.spage1181
dc.citation.epage1184
dc.citation.other87(5-8): 1181-1184
dc.citation.rankM21
dc.identifier.doi10.1016/j.mee.2009.12.039
dc.identifier.rcubConv_2500
dc.identifier.scopus2-s2.0-77049097119
dc.identifier.wos000276300700124
dc.type.versionpublishedVersion


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