Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption
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This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.
Ključne reči:Multilayer adsorption / Adsorption-desorption noise / MEMS/NEMS sensors / MEMS/NEMS resonant structures
Izvor:Microelectronic Engineering, 2010, 87, 5-8, 1181-1184
- Elsevier Science Bv, Amsterdam