This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.
TY - JOUR
AU - Đurić, Zoran G.
AU - Jokić, Ivana
AU - Djukic, Maja M.
AU - Frantlović, Miloš
PY - 2010
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/733
AB - This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.
PB - Elsevier
T2 - Microelectronic Engineering
T1 - Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption
VL - 87
IS - 5-8
SP - 1181
EP - 1184
DO - 10.1016/j.mee.2009.12.039
ER -
@article{
author = "Đurić, Zoran G. and Jokić, Ivana and Djukic, Maja M. and Frantlović, Miloš",
year = "2010",
abstract = "This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.",
publisher = "Elsevier",
journal = "Microelectronic Engineering",
title = "Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption",
volume = "87",
number = "5-8",
pages = "1181-1184",
doi = "10.1016/j.mee.2009.12.039"
}
Đurić, Z. G., Jokić, I., Djukic, M. M.,& Frantlović, M.. (2010). Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption. in Microelectronic Engineering
Elsevier., 87(5-8), 1181-1184.
https://doi.org/10.1016/j.mee.2009.12.039
Đurić ZG, Jokić I, Djukic MM, Frantlović M. Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption. in Microelectronic Engineering. 2010;87(5-8):1181-1184.
doi:10.1016/j.mee.2009.12.039 .
Đurić, Zoran G., Jokić, Ivana, Djukic, Maja M., Frantlović, Miloš, "Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption" in Microelectronic Engineering, 87, no. 5-8 (2010):1181-1184,
https://doi.org/10.1016/j.mee.2009.12.039 . .
