Integrated multicolor detector utilizing 1-D photonic bandgap filter with wedge-shaped defect
Само за регистроване кориснике
1999
Аутори
Jakšić, ZoranPetrović, Radomir
Randjelović, Danijela
Danković, Tatjana
Đurić, Zoran
Ehrfeld, Wolfgang
Schmidt, Andreas
Hecker, Klaus
Конференцијски прилог (Објављена верзија)
,
Society of Photo-Optical Instrumentation Engineers (SPIE)
Метаподаци
Приказ свих података о документуАпстракт
Abstract
We propose a single-chip multicolor photodetector for (3-5) μm range based on a linear IR semiconductor detector array with an integrated 1-D photonic bandgap (PBG) filter. A wedge-shaped defect slab (corresponding to a Fizeau-type interferometer) is introduced into the filter instead of one of the layers. The bandgap of the photonic crystal coincides with the spectral sensitivity range of the photodetector array, while the built-in defect gives a transmission peak within the same range. The defect thickness varies along the array length and thus shifts the transmission peak wavelength. The optimized photonic bandgap filter including defect is designed using the transfer matrix method. The peak frequency is tuned by choosing the geometrical parameters of the wedge-shaped defect. In our experiments, thin alternating Si and SiO2 films are sputtered onto the array surface, thus forming a 1-D PBG structure. The defect is fabricated by gradually changing the middle Si layer thickn...ess over the width of the array. Its wedge-forming is performed by micromachining or, alternatively, by in-situ oblique deposition within the sputtering system and, possibly, subsequent chemomechanical polishing. The characteristics of the finished PBG structure are measured using an IR spectrophotometer. An increase of the number of PBG layers improves the confinement of transmission peaks and thus decreases the crosstalk between the array elements. Although our multicolor detector is designed for the (3-5) μm atmospheric window, it can be straightforwardly redesigned for any other optical range.
Кључне речи:
Bragg reflectors / Fizeau interferometers / Integrated multicolor detectors / Integrated one-dimensional photonic bandgap (PBG) filters / Microfabrications / Microoptoelectromechanical systems (MOEMS) / Photonic crystals / Crystals / Infrared spectrophotometers / Interferometers / Microelectromechanical devices / Micromachining / Mirrors / Optical filters / Semiconducting silicon compounds / Semiconductor device structures / Sensitivity analysis / Sputter deposition / Thin filmsИзвор:
Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS, 1999, 3680, II, 611-619Издавач:
- Society of Photo-Optical Instrumentation Engineers (SPIE)
Финансирање / пројекти:
- Volkswagen Foundation within the framework of the project I/72 957
Институција/група
IHTMTY - CONF AU - Jakšić, Zoran AU - Petrović, Radomir AU - Randjelović, Danijela AU - Danković, Tatjana AU - Đurić, Zoran AU - Ehrfeld, Wolfgang AU - Schmidt, Andreas AU - Hecker, Klaus PY - 1999 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/6864 AB - Abstract We propose a single-chip multicolor photodetector for (3-5) μm range based on a linear IR semiconductor detector array with an integrated 1-D photonic bandgap (PBG) filter. A wedge-shaped defect slab (corresponding to a Fizeau-type interferometer) is introduced into the filter instead of one of the layers. The bandgap of the photonic crystal coincides with the spectral sensitivity range of the photodetector array, while the built-in defect gives a transmission peak within the same range. The defect thickness varies along the array length and thus shifts the transmission peak wavelength. The optimized photonic bandgap filter including defect is designed using the transfer matrix method. The peak frequency is tuned by choosing the geometrical parameters of the wedge-shaped defect. In our experiments, thin alternating Si and SiO2 films are sputtered onto the array surface, thus forming a 1-D PBG structure. The defect is fabricated by gradually changing the middle Si layer thickness over the width of the array. Its wedge-forming is performed by micromachining or, alternatively, by in-situ oblique deposition within the sputtering system and, possibly, subsequent chemomechanical polishing. The characteristics of the finished PBG structure are measured using an IR spectrophotometer. An increase of the number of PBG layers improves the confinement of transmission peaks and thus decreases the crosstalk between the array elements. Although our multicolor detector is designed for the (3-5) μm atmospheric window, it can be straightforwardly redesigned for any other optical range. PB - Society of Photo-Optical Instrumentation Engineers (SPIE) C3 - Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS T1 - Integrated multicolor detector utilizing 1-D photonic bandgap filter with wedge-shaped defect VL - 3680 IS - II SP - 611 EP - 619 DO - 10.1117/12.341252 ER -
@conference{ author = "Jakšić, Zoran and Petrović, Radomir and Randjelović, Danijela and Danković, Tatjana and Đurić, Zoran and Ehrfeld, Wolfgang and Schmidt, Andreas and Hecker, Klaus", year = "1999", abstract = "Abstract We propose a single-chip multicolor photodetector for (3-5) μm range based on a linear IR semiconductor detector array with an integrated 1-D photonic bandgap (PBG) filter. A wedge-shaped defect slab (corresponding to a Fizeau-type interferometer) is introduced into the filter instead of one of the layers. The bandgap of the photonic crystal coincides with the spectral sensitivity range of the photodetector array, while the built-in defect gives a transmission peak within the same range. The defect thickness varies along the array length and thus shifts the transmission peak wavelength. The optimized photonic bandgap filter including defect is designed using the transfer matrix method. The peak frequency is tuned by choosing the geometrical parameters of the wedge-shaped defect. In our experiments, thin alternating Si and SiO2 films are sputtered onto the array surface, thus forming a 1-D PBG structure. The defect is fabricated by gradually changing the middle Si layer thickness over the width of the array. Its wedge-forming is performed by micromachining or, alternatively, by in-situ oblique deposition within the sputtering system and, possibly, subsequent chemomechanical polishing. The characteristics of the finished PBG structure are measured using an IR spectrophotometer. An increase of the number of PBG layers improves the confinement of transmission peaks and thus decreases the crosstalk between the array elements. Although our multicolor detector is designed for the (3-5) μm atmospheric window, it can be straightforwardly redesigned for any other optical range.", publisher = "Society of Photo-Optical Instrumentation Engineers (SPIE)", journal = "Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS", title = "Integrated multicolor detector utilizing 1-D photonic bandgap filter with wedge-shaped defect", volume = "3680", number = "II", pages = "611-619", doi = "10.1117/12.341252" }
Jakšić, Z., Petrović, R., Randjelović, D., Danković, T., Đurić, Z., Ehrfeld, W., Schmidt, A.,& Hecker, K.. (1999). Integrated multicolor detector utilizing 1-D photonic bandgap filter with wedge-shaped defect. in Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS Society of Photo-Optical Instrumentation Engineers (SPIE)., 3680(II), 611-619. https://doi.org/10.1117/12.341252
Jakšić Z, Petrović R, Randjelović D, Danković T, Đurić Z, Ehrfeld W, Schmidt A, Hecker K. Integrated multicolor detector utilizing 1-D photonic bandgap filter with wedge-shaped defect. in Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS. 1999;3680(II):611-619. doi:10.1117/12.341252 .
Jakšić, Zoran, Petrović, Radomir, Randjelović, Danijela, Danković, Tatjana, Đurić, Zoran, Ehrfeld, Wolfgang, Schmidt, Andreas, Hecker, Klaus, "Integrated multicolor detector utilizing 1-D photonic bandgap filter with wedge-shaped defect" in Proceedings of SPIE - The International Society for Optical Engineering, Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS, 3680, no. II (1999):611-619, https://doi.org/10.1117/12.341252 . .