Приказ основних података о документу

dc.creatorJović, Vesna
dc.creatorLamovec, Jelena
dc.creatorStarčević, Marko
dc.creatorĐinović, Zoran
dc.creatorSmiljanić, Milče M.
dc.creatorLazić, Žarko
dc.date.accessioned2023-02-26T13:28:20Z
dc.date.available2023-02-26T13:28:20Z
dc.date.issued2018
dc.identifier.isbn978-86-81123-82-9
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/5795
dc.description.abstractNowadays, with no doubt, PDMS, poly(dimethylsiloxane) elastomer is material of choice for microfluidic fabrication because of its unique chemical, optical and mechanical properties. Unfortunately, it is not photo-definable (i.e. not a photoresist) and fabrication of PDMS MEM (micro-electro-mechanical) devices is typically done using soft lithography. Some steps of the process are difficult to perform without manually handling PDMS layers. Next problem to be considered in patterning PDMS membranes is bond strength between membrane and silicon substrate. To investigate this, we fabricated PDMS membranes on silicon either by spin coating Si wafer or transferring previously fabricated PDMS membrane to Si chip with bonding layer on it. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Fabrication of test structures is based on bulk micromachining on ⟨100⟩ oriented Si wafers to fabricate square cavities on which PDMS membranes were realized by one of mentioned procedures. Mechanical testing of PDMS membranes, elastic properties and adhesion strength of membranes with different thicknesses were investigated applying pressurized bulge testing. Pressure was applied to the PDMS membrane via nitrogen gas and the resulting load-deflection curves were monitoring.sr
dc.language.isoensr
dc.publisherBelgrade : The Military Technical Institutesr
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//sr
dc.relationIntegrated Microsystems Austria GmbH – Austrian Center for Medical Innovation and Technology from Wiener Neustadt, Österreich, through the research and development project named “Phase Change Actuator (PCA) for Steering Catheter”.sr
dc.rightsopenAccesssr
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.sourceProceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgradesr
dc.subjectPolydimethylsiloxane (PDMS)sr
dc.subjectproccesing PDMS membranessr
dc.subjectPDMS membrane spin coated on bulk machined siliconsr
dc.subjectPDMS membrane transfersr
dc.subjectbulge testsr
dc.subjectadhesion strengthsr
dc.titleExperimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavitysr
dc.typeconferenceObjectsr
dc.rights.licenseBYsr
dc.citation.spage462
dc.citation.epage467
dc.identifier.rcubhttps://hdl.handle.net/21.15107/rcub_cer_5795
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs/bitstream/id/24092/bitstream_24092.pdf
dc.type.versionpublishedVersionsr


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