Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity
Authors
Jović, Vesna
Lamovec, Jelena

Starčević, Marko
Đinović, Zoran
Smiljanić, Milče M.

Lazić, Žarko

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Nowadays, with no doubt, PDMS, poly(dimethylsiloxane) elastomer is material of choice for microfluidic
fabrication because of its unique chemical, optical and mechanical properties. Unfortunately, it is not photo-definable (i.e.
not a photoresist) and fabrication of PDMS MEM (micro-electro-mechanical) devices is typically done using soft
lithography. Some steps of the process are difficult to perform without manually handling PDMS layers. Next problem to be
considered in patterning PDMS membranes is bond strength between membrane and silicon substrate. To investigate this,
we fabricated PDMS membranes on silicon either by spin coating Si wafer or transferring previously fabricated PDMS
membrane to Si chip with bonding layer on it. PDMS network samples for this research were synthesized with the same
composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent,
volume ratio 10:1. Fabrication of test structures is based... on bulk micromachining on ⟨100⟩ oriented Si wafers to fabricate
square cavities on which PDMS membranes were realized by one of mentioned procedures. Mechanical testing of PDMS
membranes, elastic properties and adhesion strength of membranes with different thicknesses were investigated applying
pressurized bulge testing. Pressure was applied to the PDMS membrane via nitrogen gas and the resulting load-deflection
curves were monitoring.
Keywords:
Polydimethylsiloxane (PDMS) / proccesing PDMS membranes / PDMS membrane spin coated on bulk machined silicon / PDMS membrane transfer / bulge test / adhesion strengthSource:
Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade, 2018, 462-467Publisher:
- Belgrade : The Military Technical Institute
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Integrated Microsystems Austria GmbH – Austrian Center for Medical Innovation and Technology from Wiener Neustadt, Österreich, through the research and development project named “Phase Change Actuator (PCA) for Steering Catheter”.
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Institution/Community
IHTMTY - CONF AU - Jović, Vesna AU - Lamovec, Jelena AU - Starčević, Marko AU - Đinović, Zoran AU - Smiljanić, Milče M. AU - Lazić, Žarko PY - 2018 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5795 AB - Nowadays, with no doubt, PDMS, poly(dimethylsiloxane) elastomer is material of choice for microfluidic fabrication because of its unique chemical, optical and mechanical properties. Unfortunately, it is not photo-definable (i.e. not a photoresist) and fabrication of PDMS MEM (micro-electro-mechanical) devices is typically done using soft lithography. Some steps of the process are difficult to perform without manually handling PDMS layers. Next problem to be considered in patterning PDMS membranes is bond strength between membrane and silicon substrate. To investigate this, we fabricated PDMS membranes on silicon either by spin coating Si wafer or transferring previously fabricated PDMS membrane to Si chip with bonding layer on it. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Fabrication of test structures is based on bulk micromachining on ⟨100⟩ oriented Si wafers to fabricate square cavities on which PDMS membranes were realized by one of mentioned procedures. Mechanical testing of PDMS membranes, elastic properties and adhesion strength of membranes with different thicknesses were investigated applying pressurized bulge testing. Pressure was applied to the PDMS membrane via nitrogen gas and the resulting load-deflection curves were monitoring. PB - Belgrade : The Military Technical Institute C3 - Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade T1 - Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity SP - 462 EP - 467 UR - https://hdl.handle.net/21.15107/rcub_cer_5795 ER -
@conference{ author = "Jović, Vesna and Lamovec, Jelena and Starčević, Marko and Đinović, Zoran and Smiljanić, Milče M. and Lazić, Žarko", year = "2018", abstract = "Nowadays, with no doubt, PDMS, poly(dimethylsiloxane) elastomer is material of choice for microfluidic fabrication because of its unique chemical, optical and mechanical properties. Unfortunately, it is not photo-definable (i.e. not a photoresist) and fabrication of PDMS MEM (micro-electro-mechanical) devices is typically done using soft lithography. Some steps of the process are difficult to perform without manually handling PDMS layers. Next problem to be considered in patterning PDMS membranes is bond strength between membrane and silicon substrate. To investigate this, we fabricated PDMS membranes on silicon either by spin coating Si wafer or transferring previously fabricated PDMS membrane to Si chip with bonding layer on it. PDMS network samples for this research were synthesized with the same composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, volume ratio 10:1. Fabrication of test structures is based on bulk micromachining on ⟨100⟩ oriented Si wafers to fabricate square cavities on which PDMS membranes were realized by one of mentioned procedures. Mechanical testing of PDMS membranes, elastic properties and adhesion strength of membranes with different thicknesses were investigated applying pressurized bulge testing. Pressure was applied to the PDMS membrane via nitrogen gas and the resulting load-deflection curves were monitoring.", publisher = "Belgrade : The Military Technical Institute", journal = "Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade", title = "Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity", pages = "462-467", url = "https://hdl.handle.net/21.15107/rcub_cer_5795" }
Jović, V., Lamovec, J., Starčević, M., Đinović, Z., Smiljanić, M. M.,& Lazić, Ž.. (2018). Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity. in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade Belgrade : The Military Technical Institute., 462-467. https://hdl.handle.net/21.15107/rcub_cer_5795
Jović V, Lamovec J, Starčević M, Đinović Z, Smiljanić MM, Lazić Ž. Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity. in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade. 2018;:462-467. https://hdl.handle.net/21.15107/rcub_cer_5795 .
Jović, Vesna, Lamovec, Jelena, Starčević, Marko, Đinović, Zoran, Smiljanić, Milče M., Lazić, Žarko, "Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity" in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade (2018):462-467, https://hdl.handle.net/21.15107/rcub_cer_5795 .