Direct Laser Writing of micro-structures in vector mode for chemical sensors
2018
Преузимање 🢃
Аутори
Sarajlić, MilijaSmiljanić, Milče M.
Lazić, Žarko
Cvetanović Zobenica, Katarina
Randjelović, Danijela
Vasiljević-Radović, Dana
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Chemical sensors are the key part of the sensing
platforms. They have different operating principles, but most of
them are based on microstructures formed on the surface of the
chip. In this paper we present technique for obtaining micro
sized structures for the use in two different types of the chemical
sensors. One type of the sensor is based on the electrical
conductivity alteration in Au thin-film while the other is based
on the optical properties of periodic metallic structures utilizing
plasmonic effects. Technique presented here is based on the laser
writing on the photosensitive material in “vector mode” where
only continuous lines could be directly written. Width of the
written lines is modified by alternating technique parameters.
Narrowest obtained lines have width of about 1 m with
clearance of about 3 m.
Кључне речи:
Chemical Sensors / MEMS / Photolithography / Laser WriterИзвор:
Proceedings of papers- 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, une 11 - 14, 2018, Palić, Serbia, 2018, 949-952Издавач:
- ETRAN Society
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
Институција/група
IHTMTY - CONF AU - Sarajlić, Milija AU - Smiljanić, Milče M. AU - Lazić, Žarko AU - Cvetanović Zobenica, Katarina AU - Randjelović, Danijela AU - Vasiljević-Radović, Dana PY - 2018 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5793 AB - Chemical sensors are the key part of the sensing platforms. They have different operating principles, but most of them are based on microstructures formed on the surface of the chip. In this paper we present technique for obtaining micro sized structures for the use in two different types of the chemical sensors. One type of the sensor is based on the electrical conductivity alteration in Au thin-film while the other is based on the optical properties of periodic metallic structures utilizing plasmonic effects. Technique presented here is based on the laser writing on the photosensitive material in “vector mode” where only continuous lines could be directly written. Width of the written lines is modified by alternating technique parameters. Narrowest obtained lines have width of about 1 m with clearance of about 3 m. PB - ETRAN Society C3 - Proceedings of papers- 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, une 11 - 14, 2018, Palić, Serbia T1 - Direct Laser Writing of micro-structures in vector mode for chemical sensors SP - 949 EP - 952 UR - https://hdl.handle.net/21.15107/rcub_cer_5793 ER -
@conference{ author = "Sarajlić, Milija and Smiljanić, Milče M. and Lazić, Žarko and Cvetanović Zobenica, Katarina and Randjelović, Danijela and Vasiljević-Radović, Dana", year = "2018", abstract = "Chemical sensors are the key part of the sensing platforms. They have different operating principles, but most of them are based on microstructures formed on the surface of the chip. In this paper we present technique for obtaining micro sized structures for the use in two different types of the chemical sensors. One type of the sensor is based on the electrical conductivity alteration in Au thin-film while the other is based on the optical properties of periodic metallic structures utilizing plasmonic effects. Technique presented here is based on the laser writing on the photosensitive material in “vector mode” where only continuous lines could be directly written. Width of the written lines is modified by alternating technique parameters. Narrowest obtained lines have width of about 1 m with clearance of about 3 m.", publisher = "ETRAN Society", journal = "Proceedings of papers- 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, une 11 - 14, 2018, Palić, Serbia", title = "Direct Laser Writing of micro-structures in vector mode for chemical sensors", pages = "949-952", url = "https://hdl.handle.net/21.15107/rcub_cer_5793" }
Sarajlić, M., Smiljanić, M. M., Lazić, Ž., Cvetanović Zobenica, K., Randjelović, D.,& Vasiljević-Radović, D.. (2018). Direct Laser Writing of micro-structures in vector mode for chemical sensors. in Proceedings of papers- 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, une 11 - 14, 2018, Palić, Serbia ETRAN Society., 949-952. https://hdl.handle.net/21.15107/rcub_cer_5793
Sarajlić M, Smiljanić MM, Lazić Ž, Cvetanović Zobenica K, Randjelović D, Vasiljević-Radović D. Direct Laser Writing of micro-structures in vector mode for chemical sensors. in Proceedings of papers- 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, une 11 - 14, 2018, Palić, Serbia. 2018;:949-952. https://hdl.handle.net/21.15107/rcub_cer_5793 .
Sarajlić, Milija, Smiljanić, Milče M., Lazić, Žarko, Cvetanović Zobenica, Katarina, Randjelović, Danijela, Vasiljević-Radović, Dana, "Direct Laser Writing of micro-structures in vector mode for chemical sensors" in Proceedings of papers- 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, une 11 - 14, 2018, Palić, Serbia (2018):949-952, https://hdl.handle.net/21.15107/rcub_cer_5793 .