Direct Laser Writing of micro-structures in vector mode for chemical sensors

Abstract

Chemical sensors are the key part of the sensing platforms. They have different operating principles, but most of them are based on microstructures formed on the surface of the chip. In this paper we present technique for obtaining micro sized structures for the use in two different types of the chemical sensors. One type of the sensor is based on the electrical conductivity alteration in Au thin-film while the other is based on the optical properties of periodic metallic structures utilizing plasmonic effects. Technique presented here is based on the laser writing on the photosensitive material in “vector mode” where only continuous lines could be directly written. Width of the written lines is modified by alternating technique parameters. Narrowest obtained lines have width of about 1 m with clearance of about 3 m.