Influence of geometrical parameters on performance of MEMS thermopile based flow sensor
Конференцијски прилог (Објављена верзија)
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The aim of this work is to study how performance of thermal flow sensors depends on variation of specific
geometrical parameters. Self-developed 1D analytical model was applied at a MEMS sensor based on Seebeck effect. The
main elements of the analysed structure are: p+
Si/Al thermocouples, p+
Si heater, thermally and electrically isolating
membrane and residual n-Si layer in membrane area. Two thermopiles consisting of N thermocouples are placed
symmetrically at both sides of the heater. In this type of flow sensor output signal is obtained as a difference between the
Seebeck voltages generated at the downstream and upstream thermopile. It was assumed that sensor is placed in the
constant air flow. Several parameters of interest were calculated including flow induced temperature difference established
between the downstream and upstream thermopile, output voltage and sensitivity. Simulations were performed in order to
analyse dependence of these parameters on residua...l n-Si layer thickness (dnSi), distance between the hot thermopile
junctions and the heater (Δl) and thermocouple width (wTP) and length (lTP). Simulation results show that sensitivity of the
thermal flow sensor is improving with increasing Δl and lTP. On the other hand, performance of the sensor will also increase
if dnSi or wTP are decreasing.
Кључне речи:
MEMS / flow sensor / thermopile / analytical modellingИзвор:
Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, 6-7 October 2016, Belgrade, Serbia, 2016, 362-366Издавач:
- Belgrade : The Military Technical Institute
Финансирање / пројекти:
Институција/група
IHTMTY - CONF AU - Randjelović, Danijela AU - Jakšić, Olga AU - Smiljanić, Milče M. AU - Poljak, Predrag AU - Lazić, Žarko PY - 2016 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5792 AB - The aim of this work is to study how performance of thermal flow sensors depends on variation of specific geometrical parameters. Self-developed 1D analytical model was applied at a MEMS sensor based on Seebeck effect. The main elements of the analysed structure are: p+ Si/Al thermocouples, p+ Si heater, thermally and electrically isolating membrane and residual n-Si layer in membrane area. Two thermopiles consisting of N thermocouples are placed symmetrically at both sides of the heater. In this type of flow sensor output signal is obtained as a difference between the Seebeck voltages generated at the downstream and upstream thermopile. It was assumed that sensor is placed in the constant air flow. Several parameters of interest were calculated including flow induced temperature difference established between the downstream and upstream thermopile, output voltage and sensitivity. Simulations were performed in order to analyse dependence of these parameters on residual n-Si layer thickness (dnSi), distance between the hot thermopile junctions and the heater (Δl) and thermocouple width (wTP) and length (lTP). Simulation results show that sensitivity of the thermal flow sensor is improving with increasing Δl and lTP. On the other hand, performance of the sensor will also increase if dnSi or wTP are decreasing. PB - Belgrade : The Military Technical Institute C3 - Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, 6-7 October 2016, Belgrade, Serbia T1 - Influence of geometrical parameters on performance of MEMS thermopile based flow sensor SP - 362 EP - 366 UR - https://hdl.handle.net/21.15107/rcub_cer_5792 ER -
@conference{ author = "Randjelović, Danijela and Jakšić, Olga and Smiljanić, Milče M. and Poljak, Predrag and Lazić, Žarko", year = "2016", abstract = "The aim of this work is to study how performance of thermal flow sensors depends on variation of specific geometrical parameters. Self-developed 1D analytical model was applied at a MEMS sensor based on Seebeck effect. The main elements of the analysed structure are: p+ Si/Al thermocouples, p+ Si heater, thermally and electrically isolating membrane and residual n-Si layer in membrane area. Two thermopiles consisting of N thermocouples are placed symmetrically at both sides of the heater. In this type of flow sensor output signal is obtained as a difference between the Seebeck voltages generated at the downstream and upstream thermopile. It was assumed that sensor is placed in the constant air flow. Several parameters of interest were calculated including flow induced temperature difference established between the downstream and upstream thermopile, output voltage and sensitivity. Simulations were performed in order to analyse dependence of these parameters on residual n-Si layer thickness (dnSi), distance between the hot thermopile junctions and the heater (Δl) and thermocouple width (wTP) and length (lTP). Simulation results show that sensitivity of the thermal flow sensor is improving with increasing Δl and lTP. On the other hand, performance of the sensor will also increase if dnSi or wTP are decreasing.", publisher = "Belgrade : The Military Technical Institute", journal = "Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, 6-7 October 2016, Belgrade, Serbia", title = "Influence of geometrical parameters on performance of MEMS thermopile based flow sensor", pages = "362-366", url = "https://hdl.handle.net/21.15107/rcub_cer_5792" }
Randjelović, D., Jakšić, O., Smiljanić, M. M., Poljak, P.,& Lazić, Ž.. (2016). Influence of geometrical parameters on performance of MEMS thermopile based flow sensor. in Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, 6-7 October 2016, Belgrade, Serbia Belgrade : The Military Technical Institute., 362-366. https://hdl.handle.net/21.15107/rcub_cer_5792
Randjelović D, Jakšić O, Smiljanić MM, Poljak P, Lazić Ž. Influence of geometrical parameters on performance of MEMS thermopile based flow sensor. in Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, 6-7 October 2016, Belgrade, Serbia. 2016;:362-366. https://hdl.handle.net/21.15107/rcub_cer_5792 .
Randjelović, Danijela, Jakšić, Olga, Smiljanić, Milče M., Poljak, Predrag, Lazić, Žarko, "Influence of geometrical parameters on performance of MEMS thermopile based flow sensor" in Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, 6-7 October 2016, Belgrade, Serbia (2016):362-366, https://hdl.handle.net/21.15107/rcub_cer_5792 .