Analysis of response and adsorption-desorption fluctuations spectrum of MEMS/NEMS chemical and biological sensors
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Micro/nanoelectromechanical (MEMS/NEMS) sensors, whose principle of operation is based on adsorptiondesorption process, are highly sensitive, selective, small and portable. In this paper the theoretical analysis is presented
of both the response and the spectrum of adsorption-desorption noise of such sensors intended for detection of substances present in gas or in liquid phase.
Keywords:
adsorption-desorption / MEMS/NEMS / sensorsSource:
Proceedings - 4th International Scientific Conference on Defensive Technologies OTEH 2011, 6-7 October, 2011, Belgrade, 2011, 447-451Publisher:
- Belgrade : The Military Technical Institute
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
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IHTMTY - CONF AU - Jokić, Ivana AU - Đurić, Zoran AU - Radulović, Katarina AU - Frantlović, Miloš AU - Krstajić, Predrag PY - 2011 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5741 AB - Micro/nanoelectromechanical (MEMS/NEMS) sensors, whose principle of operation is based on adsorptiondesorption process, are highly sensitive, selective, small and portable. In this paper the theoretical analysis is presented of both the response and the spectrum of adsorption-desorption noise of such sensors intended for detection of substances present in gas or in liquid phase. PB - Belgrade : The Military Technical Institute C3 - Proceedings - 4th International Scientific Conference on Defensive Technologies OTEH 2011, 6-7 October, 2011, Belgrade T1 - Analysis of response and adsorption-desorption fluctuations spectrum of MEMS/NEMS chemical and biological sensors SP - 447 EP - 451 UR - https://hdl.handle.net/21.15107/rcub_cer_5741 ER -
@conference{ author = "Jokić, Ivana and Đurić, Zoran and Radulović, Katarina and Frantlović, Miloš and Krstajić, Predrag", year = "2011", abstract = "Micro/nanoelectromechanical (MEMS/NEMS) sensors, whose principle of operation is based on adsorptiondesorption process, are highly sensitive, selective, small and portable. In this paper the theoretical analysis is presented of both the response and the spectrum of adsorption-desorption noise of such sensors intended for detection of substances present in gas or in liquid phase.", publisher = "Belgrade : The Military Technical Institute", journal = "Proceedings - 4th International Scientific Conference on Defensive Technologies OTEH 2011, 6-7 October, 2011, Belgrade", title = "Analysis of response and adsorption-desorption fluctuations spectrum of MEMS/NEMS chemical and biological sensors", pages = "447-451", url = "https://hdl.handle.net/21.15107/rcub_cer_5741" }
Jokić, I., Đurić, Z., Radulović, K., Frantlović, M.,& Krstajić, P.. (2011). Analysis of response and adsorption-desorption fluctuations spectrum of MEMS/NEMS chemical and biological sensors. in Proceedings - 4th International Scientific Conference on Defensive Technologies OTEH 2011, 6-7 October, 2011, Belgrade Belgrade : The Military Technical Institute., 447-451. https://hdl.handle.net/21.15107/rcub_cer_5741
Jokić I, Đurić Z, Radulović K, Frantlović M, Krstajić P. Analysis of response and adsorption-desorption fluctuations spectrum of MEMS/NEMS chemical and biological sensors. in Proceedings - 4th International Scientific Conference on Defensive Technologies OTEH 2011, 6-7 October, 2011, Belgrade. 2011;:447-451. https://hdl.handle.net/21.15107/rcub_cer_5741 .
Jokić, Ivana, Đurić, Zoran, Radulović, Katarina, Frantlović, Miloš, Krstajić, Predrag, "Analysis of response and adsorption-desorption fluctuations spectrum of MEMS/NEMS chemical and biological sensors" in Proceedings - 4th International Scientific Conference on Defensive Technologies OTEH 2011, 6-7 October, 2011, Belgrade (2011):447-451, https://hdl.handle.net/21.15107/rcub_cer_5741 .