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dc.creatorSmiljanić, Milče M.
dc.creatorRadulović, Katarina
dc.creatorLazić, Žarko
dc.creatorJović, Vesna
dc.creatorPopović, Bogdan
dc.date.accessioned2023-02-18T23:32:49Z
dc.date.available2023-02-18T23:32:49Z
dc.date.issued2012
dc.identifier.isbn978-86-81123-85-4
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/5737
dc.description.abstractSilicon-On-Insulator (SOI) wafers utilizing a novel maskless wet etching technique. The prototype has a structured square diaphragm with a concentric boss. The SOI pressure sensors have piezoresistors dielectrically isolated from each other and from the substrate by silicon dioxide. A high temperature transducer prototype has been made utilizing the fabricated sensor. A high temperature method for pressure measurements has been formed. The transducer prototype performance was measured at temperatures up to 300 0С. These SOI pressure sensors are intended for extreme environmental conditions and high operating temperatures that are often needed in military-grade applications and where it is necessary to perform sensitive low pressure measurements. Some examples include aerospace applications like aircraft engines, wind tunnels, various missiles, etc.sr
dc.language.isoensr
dc.publisherBelgrade : The Military Technical Institutesr
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//sr
dc.rightsopenAccesssr
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.sourceProceedings - 5th International Scientific Conference on Defensive Technologies OTEH 2012, 18 – 19 september 2012, Belgradesr
dc.subjectpressure sensorsr
dc.subjectpiezoresistivitysr
dc.subjectSOIsr
dc.subjectlow pressuresr
dc.subjecthigh temperaturesr
dc.titleSOI piezoresistive low pressure sensor for high temperature environmentssr
dc.typeconferenceObjectsr
dc.rights.licenseBYsr
dc.citation.spage422
dc.citation.epage426
dc.identifier.rcubhttps://hdl.handle.net/21.15107/rcub_cer_5737
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs/bitstream/id/23849/bitstream_23849.pdf
dc.type.versionpublishedVersionsr


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