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| Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au | 53 |
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| Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au | 3 | 12 | 17 | 1 | 1 | 1 | 0 |
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| IcETRAN2014Lazic.pdf | 38 |
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