In this paper we developed various techniques of wet isotropic chemical etching of Pyrex glass in an aqueous solution of 49% HF. The techniques are based on the processes of sputtering and photolithography. The various thin films of Cr/Au were sputtered. Layers of Cr/Au and photoresist serve as a masking material during etching of Pyrex glass in aqueous HF.
TY - CONF
AU - Lazić, Žarko
AU - Smiljanić, Milče M.
AU - Rašljić, Milena
AU - Mladenović, Ivana
AU - Radulović, Katarina
AU - Sarajlić, Milija
AU - Vasiljević-Radović, Dana
PY - 2014
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5735
AB - In this paper we developed various techniques of wet isotropic chemical etching of Pyrex glass in an aqueous solution of 49% HF. The techniques are based on the processes of sputtering and photolithography. The various thin films of Cr/Au were sputtered. Layers of Cr/Au and photoresist serve as a masking material during etching of Pyrex glass in aqueous HF.
PB - Beograd : Društvo za ETRAN / Belgrade : ETRAN Society
C3 - Proceedings - 1st International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2014
T1 - Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au
SP - pp. MOI1.1.1
EP - pp. MOI1.1.4
UR - https://hdl.handle.net/21.15107/rcub_cer_5735
ER -
@conference{
author = "Lazić, Žarko and Smiljanić, Milče M. and Rašljić, Milena and Mladenović, Ivana and Radulović, Katarina and Sarajlić, Milija and Vasiljević-Radović, Dana",
year = "2014",
abstract = "In this paper we developed various techniques of wet isotropic chemical etching of Pyrex glass in an aqueous solution of 49% HF. The techniques are based on the processes of sputtering and photolithography. The various thin films of Cr/Au were sputtered. Layers of Cr/Au and photoresist serve as a masking material during etching of Pyrex glass in aqueous HF.",
publisher = "Beograd : Društvo za ETRAN / Belgrade : ETRAN Society",
journal = "Proceedings - 1st International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2014",
title = "Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au",
pages = "pp. MOI1.1.1-pp. MOI1.1.4",
url = "https://hdl.handle.net/21.15107/rcub_cer_5735"
}
Lazić, Ž., Smiljanić, M. M., Rašljić, M., Mladenović, I., Radulović, K., Sarajlić, M.,& Vasiljević-Radović, D.. (2014). Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au. in Proceedings - 1st International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2014
Beograd : Društvo za ETRAN / Belgrade : ETRAN Society., pp. MOI1.1.1-pp. MOI1.1.4.
https://hdl.handle.net/21.15107/rcub_cer_5735
Lazić Ž, Smiljanić MM, Rašljić M, Mladenović I, Radulović K, Sarajlić M, Vasiljević-Radović D. Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au. in Proceedings - 1st International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2014. 2014;:pp. MOI1.1.1-pp. MOI1.1.4.
https://hdl.handle.net/21.15107/rcub_cer_5735 .
Lazić, Žarko, Smiljanić, Milče M., Rašljić, Milena, Mladenović, Ivana, Radulović, Katarina, Sarajlić, Milija, Vasiljević-Radović, Dana, "Wet isotropic chemical etching of Pyrex glass with masking layers Cr/Au" in Proceedings - 1st International Conference on Electrical, Electronic and Computing Engineering IcETRAN 2014 (2014):pp. MOI1.1.1-pp. MOI1.1.4,
https://hdl.handle.net/21.15107/rcub_cer_5735 .
