In this paper it is shown how we fabricated two types of heaters for microreactors which are used in synthesis of TiO2 nanoparticles. We used standard photolithographic processes to design gold and p-type heaters diffused in n-type silicon substrate. Heaters are designed to be integrated part of microreactors. The temperature necessary for synthesis of TiO2 nanoparticles is achieved with both types of heaters. P-type diffused heaters are shown better in terms of power
consumption.
Keywords:
microreactors / gold / p – type diffusion / heaters
Source:
Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić, 2018, 953-956
TY - CONF
AU - Rašljić, Milena
AU - Smiljanić, Milče M.
AU - Lazić, Žarko
AU - Radulović, Katarina
AU - Cvetanović Zobenica, Katarina
AU - Vasiljević-Radović, Dana
PY - 2018
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5730
AB - In this paper it is shown how we fabricated two types of heaters for microreactors which are used in synthesis of TiO2 nanoparticles. We used standard photolithographic processes to design gold and p-type heaters diffused in n-type silicon substrate. Heaters are designed to be integrated part of microreactors. The temperature necessary for synthesis of TiO2 nanoparticles is achieved with both types of heaters. P-type diffused heaters are shown better in terms of power
consumption.
PB - Belgrade : ETRAN Society
C3 - Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić
T1 - Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors
SP - 953
EP - 956
UR - https://hdl.handle.net/21.15107/rcub_cer_5730
ER -
@conference{
author = "Rašljić, Milena and Smiljanić, Milče M. and Lazić, Žarko and Radulović, Katarina and Cvetanović Zobenica, Katarina and Vasiljević-Radović, Dana",
year = "2018",
abstract = "In this paper it is shown how we fabricated two types of heaters for microreactors which are used in synthesis of TiO2 nanoparticles. We used standard photolithographic processes to design gold and p-type heaters diffused in n-type silicon substrate. Heaters are designed to be integrated part of microreactors. The temperature necessary for synthesis of TiO2 nanoparticles is achieved with both types of heaters. P-type diffused heaters are shown better in terms of power
consumption.",
publisher = "Belgrade : ETRAN Society",
journal = "Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić",
title = "Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors",
pages = "953-956",
url = "https://hdl.handle.net/21.15107/rcub_cer_5730"
}
Rašljić, M., Smiljanić, M. M., Lazić, Ž., Radulović, K., Cvetanović Zobenica, K.,& Vasiljević-Radović, D.. (2018). Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors. in Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić
Belgrade : ETRAN Society., 953-956.
https://hdl.handle.net/21.15107/rcub_cer_5730
Rašljić M, Smiljanić MM, Lazić Ž, Radulović K, Cvetanović Zobenica K, Vasiljević-Radović D. Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors. in Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić. 2018;:953-956.
https://hdl.handle.net/21.15107/rcub_cer_5730 .
Rašljić, Milena, Smiljanić, Milče M., Lazić, Žarko, Radulović, Katarina, Cvetanović Zobenica, Katarina, Vasiljević-Radović, Dana, "Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors" in Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić (2018):953-956,
https://hdl.handle.net/21.15107/rcub_cer_5730 .
