Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors
Authors
Rašljić, Milena
Smiljanić, Milče M.

Lazić, Žarko

Radulović, Katarina

Cvetanović Zobenica, Katarina

Vasiljević-Radović, Dana

Conference object (Published version)
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In this paper it is shown how we fabricated two types of heaters for microreactors which are used in synthesis of TiO2 nanoparticles. We used standard photolithographic processes to design gold and p-type heaters diffused in n-type silicon substrate. Heaters are designed to be integrated part of microreactors. The temperature necessary for synthesis of TiO2 nanoparticles is achieved with both types of heaters. P-type diffused heaters are shown better in terms of power
consumption.
Keywords:
microreactors / gold / p – type diffusion / heatersSource:
Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić, 2018, 953-956Publisher:
- Belgrade : ETRAN Society
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
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IHTMTY - CONF AU - Rašljić, Milena AU - Smiljanić, Milče M. AU - Lazić, Žarko AU - Radulović, Katarina AU - Cvetanović Zobenica, Katarina AU - Vasiljević-Radović, Dana PY - 2018 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5730 AB - In this paper it is shown how we fabricated two types of heaters for microreactors which are used in synthesis of TiO2 nanoparticles. We used standard photolithographic processes to design gold and p-type heaters diffused in n-type silicon substrate. Heaters are designed to be integrated part of microreactors. The temperature necessary for synthesis of TiO2 nanoparticles is achieved with both types of heaters. P-type diffused heaters are shown better in terms of power consumption. PB - Belgrade : ETRAN Society C3 - Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić T1 - Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors SP - 953 EP - 956 UR - https://hdl.handle.net/21.15107/rcub_cer_5730 ER -
@conference{ author = "Rašljić, Milena and Smiljanić, Milče M. and Lazić, Žarko and Radulović, Katarina and Cvetanović Zobenica, Katarina and Vasiljević-Radović, Dana", year = "2018", abstract = "In this paper it is shown how we fabricated two types of heaters for microreactors which are used in synthesis of TiO2 nanoparticles. We used standard photolithographic processes to design gold and p-type heaters diffused in n-type silicon substrate. Heaters are designed to be integrated part of microreactors. The temperature necessary for synthesis of TiO2 nanoparticles is achieved with both types of heaters. P-type diffused heaters are shown better in terms of power consumption.", publisher = "Belgrade : ETRAN Society", journal = "Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić", title = "Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors", pages = "953-956", url = "https://hdl.handle.net/21.15107/rcub_cer_5730" }
Rašljić, M., Smiljanić, M. M., Lazić, Ž., Radulović, K., Cvetanović Zobenica, K.,& Vasiljević-Radović, D.. (2018). Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors. in Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić Belgrade : ETRAN Society., 953-956. https://hdl.handle.net/21.15107/rcub_cer_5730
Rašljić M, Smiljanić MM, Lazić Ž, Radulović K, Cvetanović Zobenica K, Vasiljević-Radović D. Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors. in Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić. 2018;:953-956. https://hdl.handle.net/21.15107/rcub_cer_5730 .
Rašljić, Milena, Smiljanić, Milče M., Lazić, Žarko, Radulović, Katarina, Cvetanović Zobenica, Katarina, Vasiljević-Radović, Dana, "Two types of integrated heaters for synthesis of TiO2 nanoparticles in microreactors" in Proceedings of Papers – 5th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2018, 11-14.06.2018, Palić (2018):953-956, https://hdl.handle.net/21.15107/rcub_cer_5730 .