MEMS/NEMS sensors of chemical and biological agents: applicability of different models for stedy-state analysis of sensor time response and noise

Abstract

We analyze the time response of MEMS/NEMS sensors of chemical and biological agents and its noise, by using two mathematical models. One of them is commonly used in the literature on MEMS/NEMS adsorption-based chemical and biological sensors, while the other one, which is more elaborate, and takes into account additional relevant physical processes, has been developed by us. We also investigate the limits of applicability of the two models as a function of the target substance concentration, especially having in mind the decrease of the minimal detectable concentration in the new sensor generation.