Two Color Photodiodes Mounted on the Micromachined Carrier
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
In this paper, two color detector based on silicon
photodiodes is studied and fabricated. Standard IHTM
photodiode’s design is modified to allow mounting one
photodiode above another using special micromachined carrier.
The carrier is fabricated using wet silicon etching in 25% TMAH
water solution and anodic bonding of etched silicon and Pyrex
glass. The fabricated carrier also allows easy wire
thermocompression bonding from the photodiode’s pads to TO-5
housing. Output currents of the photodiodes were measured by
applying light of 900 nm and 1060 nm. Obtained results verify
applicability of the new packaging for two color detector.
Кључне речи:
Two color detector / photodiodes / micromachined packaging / silicon / Pyrex glassИзвор:
Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia, 2022, 391-394Издавач:
- Belgrade : ETRAN Society
Финансирање / пројекти:
- Министарство науке, технолошког развоја и иновација Републике Србије, институционално финансирање - 200026 (Универзитет у Београду, Институт за хемију, технологију и металургију - ИХТМ) (RS-MESTD-inst-2020-200026)
URI
https://www.etran.rs/2022/zbornik/ICETRAN-22_radovi/044-MOI1.1.pdfhttps://cer.ihtm.bg.ac.rs/handle/123456789/5640
Институција/група
IHTMTY - CONF AU - Lazić, Žarko AU - Smiljanić, Milče M. AU - Nešić, Dušan AU - Zeković, Ljubiša PY - 2022 UR - https://www.etran.rs/2022/zbornik/ICETRAN-22_radovi/044-MOI1.1.pdf UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5640 AB - In this paper, two color detector based on silicon photodiodes is studied and fabricated. Standard IHTM photodiode’s design is modified to allow mounting one photodiode above another using special micromachined carrier. The carrier is fabricated using wet silicon etching in 25% TMAH water solution and anodic bonding of etched silicon and Pyrex glass. The fabricated carrier also allows easy wire thermocompression bonding from the photodiode’s pads to TO-5 housing. Output currents of the photodiodes were measured by applying light of 900 nm and 1060 nm. Obtained results verify applicability of the new packaging for two color detector. PB - Belgrade : ETRAN Society C3 - Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia T1 - Two Color Photodiodes Mounted on the Micromachined Carrier SP - 391 EP - 394 UR - https://hdl.handle.net/21.15107/rcub_cer_5640 ER -
@conference{ author = "Lazić, Žarko and Smiljanić, Milče M. and Nešić, Dušan and Zeković, Ljubiša", year = "2022", abstract = "In this paper, two color detector based on silicon photodiodes is studied and fabricated. Standard IHTM photodiode’s design is modified to allow mounting one photodiode above another using special micromachined carrier. The carrier is fabricated using wet silicon etching in 25% TMAH water solution and anodic bonding of etched silicon and Pyrex glass. The fabricated carrier also allows easy wire thermocompression bonding from the photodiode’s pads to TO-5 housing. Output currents of the photodiodes were measured by applying light of 900 nm and 1060 nm. Obtained results verify applicability of the new packaging for two color detector.", publisher = "Belgrade : ETRAN Society", journal = "Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia", title = "Two Color Photodiodes Mounted on the Micromachined Carrier", pages = "391-394", url = "https://hdl.handle.net/21.15107/rcub_cer_5640" }
Lazić, Ž., Smiljanić, M. M., Nešić, D.,& Zeković, L.. (2022). Two Color Photodiodes Mounted on the Micromachined Carrier. in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia Belgrade : ETRAN Society., 391-394. https://hdl.handle.net/21.15107/rcub_cer_5640
Lazić Ž, Smiljanić MM, Nešić D, Zeković L. Two Color Photodiodes Mounted on the Micromachined Carrier. in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia. 2022;:391-394. https://hdl.handle.net/21.15107/rcub_cer_5640 .
Lazić, Žarko, Smiljanić, Milče M., Nešić, Dušan, Zeković, Ljubiša, "Two Color Photodiodes Mounted on the Micromachined Carrier" in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia (2022):391-394, https://hdl.handle.net/21.15107/rcub_cer_5640 .