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Features furnace to review termocouples in CMTM laboratory

Karakteristike peći za pregled termoparova u CMTM laboratoriji

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2009
docs0578.pdf (392.2Kb)
Authors
Vorkapić, Miloš
Popović, Bogdan
Tanasković, Dragan
Article (Published version)
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Abstract
The paper presents the testing and analysis of the characteristics of furnace which is previously used in the semiconductor industry. With the changes that have been analyzed, has become a part of the equipment to view thermocouples in the laboratory CMTM. Characteristics of steel block, which enable simultaneous measurements of more thermocouples to gain the necessary parameters of temperature in the right direction, are discussed.
U radu je prikazano ispitivanje i analiza karakteristika peći koja se ranije koristila u industriji poluprovodnika. Sa izmenama koje su analizirane u radu, postala je deo opreme za pregled termoparova u laboratoriji CMTM-a. Prikazane su karakteristike izotermskog čeličnog bloka kojim je omogućeno istovremeno merenje više termoparova i da se pri tome dobiju zahtevani parametri temperature u aksijalnom pravcu.
Keywords:
thermocouple / furnace / isothermal block / temperature measurement / measurement control / termopar / peć / izotermski blok / merenje temperature / kontrola merenja
Source:
Tehnika - Kvalitet, standardizacija i metrologija, 2009, 9, 4, 1-7

ISSN: 1450-989X

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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/555
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