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dc.creatorĐurić, Zoran G.
dc.creatorJokić, Ivana
dc.creatorFrantlović, Miloš
dc.creatorRadulović, Katarina
dc.date.accessioned2019-01-30T17:20:31Z
dc.date.available2019-01-30T17:20:31Z
dc.date.issued2009
dc.identifier.issn0167-9317
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/546
dc.description.abstractThis paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.en
dc.publisherElsevier
dc.rightsrestrictedAccess
dc.sourceMicroelectronic Engineering
dc.subjectMultilayer adsorptionen
dc.subjectAdsorption-desorption noiseen
dc.subjectMEMS/NEMS sensorsen
dc.subjectOscillatorsen
dc.titleTwo-layer adsorption and adsorbed mass fluctuations on micro/nanostructuresen
dc.typearticle
dc.rights.licenseARR
dcterms.abstractФрантловић, Милош; Радуловић, Катарина; Јокић, Ивана; Ђурић, Зоран Г.;
dc.citation.volume86
dc.citation.issue4-6
dc.citation.spage1278
dc.citation.epage1281
dc.citation.other86(4-6): 1278-1281
dc.citation.rankM22
dc.identifier.doi10.1016/j.mee.2008.11.083
dc.identifier.rcubConv_2449
dc.identifier.scopus2-s2.0-67349208483
dc.identifier.wos000267273300216
dc.type.versionpublishedVersion


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