This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.
TY - JOUR
AU - Đurić, Zoran G.
AU - Jokić, Ivana
AU - Frantlović, Miloš
AU - Radulović, Katarina
PY - 2009
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/546
AB - This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.
PB - Elsevier
T2 - Microelectronic Engineering
T1 - Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures
VL - 86
IS - 4-6
SP - 1278
EP - 1281
DO - 10.1016/j.mee.2008.11.083
UR - Conv_2449
ER -
@article{
author = "Đurić, Zoran G. and Jokić, Ivana and Frantlović, Miloš and Radulović, Katarina",
year = "2009",
abstract = "This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.",
publisher = "Elsevier",
journal = "Microelectronic Engineering",
title = "Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures",
volume = "86",
number = "4-6",
pages = "1278-1281",
doi = "10.1016/j.mee.2008.11.083",
url = "Conv_2449"
}
Đurić, Z. G., Jokić, I., Frantlović, M.,& Radulović, K.. (2009). Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures. in Microelectronic Engineering
Elsevier., 86(4-6), 1278-1281.
https://doi.org/10.1016/j.mee.2008.11.083
Conv_2449
Đurić ZG, Jokić I, Frantlović M, Radulović K. Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures. in Microelectronic Engineering. 2009;86(4-6):1278-1281.
doi:10.1016/j.mee.2008.11.083
Conv_2449 .
Đurić, Zoran G., Jokić, Ivana, Frantlović, Miloš, Radulović, Katarina, "Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures" in Microelectronic Engineering, 86, no. 4-6 (2009):1278-1281,
https://doi.org/10.1016/j.mee.2008.11.083 .,
Conv_2449 .
