Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures

Authorized Users Only
2009
Authors
Đurić, Zoran G.
Jokić, Ivana
Frantlović, Miloš
Radulović, Katarina
Article (Published version)
Metadata
Show full item record
Abstract
This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.
Keywords:
Multilayer adsorption / Adsorption-desorption noise / MEMS/NEMS sensors / Oscillators
Source:
Microelectronic Engineering, 2009, 86, 4-6, 1278-1281
Publisher:
  • Elsevier Science Bv, Amsterdam

DOI: 10.1016/j.mee.2008.11.083

ISSN: 0167-9317

WoS: 000267273300216

Scopus: 2-s2.0-67349208483
[ Google Scholar ]
2
3
URI
http://cer.ihtm.bg.ac.rs/handle/123456789/546
Collections
Institution
IHTM