This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.
TY - JOUR
AU - Đurić, Zoran G.
AU - Jokić, Ivana
AU - Frantlović, Miloš
AU - Radulović, Katarina
PY - 2009
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/546
AB - This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.
PB - Elsevier Science Bv, Amsterdam
T2 - Microelectronic Engineering
T1 - Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures
VL - 86
IS - 4-6
SP - 1278
EP - 1281
DO - 10.1016/j.mee.2008.11.083
ER -
@article{
author = "Đurić, Zoran G. and Jokić, Ivana and Frantlović, Miloš and Radulović, Katarina",
year = "2009",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/546",
abstract = "This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.",
publisher = "Elsevier Science Bv, Amsterdam",
journal = "Microelectronic Engineering",
title = "Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures",
volume = "86",
number = "4-6",
pages = "1278-1281",
doi = "10.1016/j.mee.2008.11.083"
}
Đurić, Z. G., Jokić, I., Frantlović, M.,& Radulović, K. (2009). Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures.
Microelectronic Engineering
Elsevier Science Bv, Amsterdam., 86(4-6), 1278-1281.
https://doi.org/10.1016/j.mee.2008.11.083
Đurić ZG, Jokić I, Frantlović M, Radulović K. Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures. Microelectronic Engineering. 2009;86(4-6):1278-1281
Đurić Zoran G., Jokić Ivana, Frantlović Miloš, Radulović Katarina, "Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures" Microelectronic Engineering, 86, no. 4-6 (2009):1278-1281,
https://doi.org/10.1016/j.mee.2008.11.083 .
