Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures
Authorized Users Only
Article (Published version)
MetadataShow full item record
This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.
Keywords:Multilayer adsorption / Adsorption-desorption noise / MEMS/NEMS sensors / Oscillators
Source:Microelectronic Engineering, 2009, 86, 4-6, 1278-1281
- Elsevier Science Bv, Amsterdam