Nickel was sputter deposited on a glass with a thin film thickness of 600 nm under either in an argon atmosphere or under a partial pressure of nitrogen of either 1.3× 10-4 or 4× 10-4 mbar. Atomic force microscopy and scanning surface potential microscopy (SSPM) were used to study the morphology and to estimate the surface resistivity of the obtained Ni thin films taking into account surface-roughness effects. For the three samples investigated, the surface resistivity values as estimated using SSPM were in good agreement with the results obtained by standard four-point probe measurements.
TY - JOUR
AU - Rakočević, Zlatko Lj.
AU - Popović, N.
AU - Bogdanov, Žarko D.
AU - Goncic, B.
AU - Štrbac, Svetlana
PY - 2008
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/447
AB - Nickel was sputter deposited on a glass with a thin film thickness of 600 nm under either in an argon atmosphere or under a partial pressure of nitrogen of either 1.3× 10-4 or 4× 10-4 mbar. Atomic force microscopy and scanning surface potential microscopy (SSPM) were used to study the morphology and to estimate the surface resistivity of the obtained Ni thin films taking into account surface-roughness effects. For the three samples investigated, the surface resistivity values as estimated using SSPM were in good agreement with the results obtained by standard four-point probe measurements.
PB - AIP Publishing
T2 - Review of Scientific Instruments
T1 - Surface resistivity estimation by scanning surface potential microscopy
VL - 79
IS - 6
DO - 10.1063/1.2937647
ER -
@article{
author = "Rakočević, Zlatko Lj. and Popović, N. and Bogdanov, Žarko D. and Goncic, B. and Štrbac, Svetlana",
year = "2008",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/447",
abstract = "Nickel was sputter deposited on a glass with a thin film thickness of 600 nm under either in an argon atmosphere or under a partial pressure of nitrogen of either 1.3× 10-4 or 4× 10-4 mbar. Atomic force microscopy and scanning surface potential microscopy (SSPM) were used to study the morphology and to estimate the surface resistivity of the obtained Ni thin films taking into account surface-roughness effects. For the three samples investigated, the surface resistivity values as estimated using SSPM were in good agreement with the results obtained by standard four-point probe measurements.",
publisher = "AIP Publishing",
journal = "Review of Scientific Instruments",
title = "Surface resistivity estimation by scanning surface potential microscopy",
volume = "79",
number = "6",
doi = "10.1063/1.2937647"
}
Rakočević ZL, Popović N, Bogdanov ŽD, Goncic B, Štrbac S. Surface resistivity estimation by scanning surface potential microscopy. Review of Scientific Instruments. 2008;79(6)
Rakočević, Z. Lj., Popović, N., Bogdanov, Ž. D., Goncic, B.,& Štrbac, S. (2008). Surface resistivity estimation by scanning surface potential microscopy.
Review of Scientific InstrumentsAIP Publishing., 79(6).
https://doi.org/10.1063/1.2937647
