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dc.creatorĐurić, Zoran G.
dc.creatorMatić, Milan J.
dc.creatorMatović, Jovan
dc.creatorPetrović, Radomir
dc.creatorSimičić, Nevenka
dc.date.accessioned2021-04-16T12:07:55Z
dc.date.available2021-04-16T12:07:55Z
dc.date.issued1990
dc.identifier.issn0924-4247
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/4457
dc.description.abstractA method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.sr
dc.language.isoensr
dc.publisherElseviersr
dc.rightsrestrictedAccesssr
dc.sourceSensors and Actuators: A.Physicalsr
dc.subjectsiliconsr
dc.subjectPressure Transducerssr
dc.subjectPressure Sensorssr
dc.subjectSemiconductor Devices--Diaphragmssr
dc.subjectSemiconducting Siliconsr
dc.titleExperimental determination of silicon pressure sensor diaphragm deflectionsr
dc.typearticlesr
dc.rights.licenseARRsr
dcterms.abstractМатовић, Јован; Ђурић, Зоран; Матић, Милан Ј.; Петровић, Радомир; Симичић, Невенка;
dc.citation.volume24
dc.citation.issue3
dc.citation.spage175
dc.citation.epage179
dc.identifier.doi10.1016/0924-4247(90)80053-8
dc.identifier.scopus2-s2.0-0025488617
dc.type.versionpublishedVersionsr


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