Experimental determination of silicon pressure sensor diaphragm deflection
Samo za registrovane korisnike
1990
Članak u časopisu (Objavljena verzija)

Metapodaci
Prikaz svih podataka o dokumentuApstrakt
A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.
Ključne reči:
silicon / Pressure Transducers / Pressure Sensors / Semiconductor Devices--Diaphragms / Semiconducting SiliconIzvor:
Sensors and Actuators: A.Physical, 1990, 24, 3, 175-179Izdavač:
- Elsevier
Institucija/grupa
IHTMTY - JOUR AU - Đurić, Zoran G. AU - Matić, Milan J. AU - Matović, Jovan AU - Petrović, Radomir AU - Simičić, Nevenka PY - 1990 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/4457 AB - A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses. PB - Elsevier T2 - Sensors and Actuators: A.Physical T1 - Experimental determination of silicon pressure sensor diaphragm deflection VL - 24 IS - 3 SP - 175 EP - 179 DO - 10.1016/0924-4247(90)80053-8 ER -
@article{ author = "Đurić, Zoran G. and Matić, Milan J. and Matović, Jovan and Petrović, Radomir and Simičić, Nevenka", year = "1990", abstract = "A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.", publisher = "Elsevier", journal = "Sensors and Actuators: A.Physical", title = "Experimental determination of silicon pressure sensor diaphragm deflection", volume = "24", number = "3", pages = "175-179", doi = "10.1016/0924-4247(90)80053-8" }
Đurić, Z. G., Matić, M. J., Matović, J., Petrović, R.,& Simičić, N.. (1990). Experimental determination of silicon pressure sensor diaphragm deflection. in Sensors and Actuators: A.Physical Elsevier., 24(3), 175-179. https://doi.org/10.1016/0924-4247(90)80053-8
Đurić ZG, Matić MJ, Matović J, Petrović R, Simičić N. Experimental determination of silicon pressure sensor diaphragm deflection. in Sensors and Actuators: A.Physical. 1990;24(3):175-179. doi:10.1016/0924-4247(90)80053-8 .
Đurić, Zoran G., Matić, Milan J., Matović, Jovan, Petrović, Radomir, Simičić, Nevenka, "Experimental determination of silicon pressure sensor diaphragm deflection" in Sensors and Actuators: A.Physical, 24, no. 3 (1990):175-179, https://doi.org/10.1016/0924-4247(90)80053-8 . .