A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.
TY - JOUR
AU - Đurić, Zoran G.
AU - Matić, Milan J.
AU - Matović, Jovan
AU - Petrović, Radomir
AU - Simičić, Nevenka
PY - 1990
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/4457
AB - A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.
PB - Elsevier
T2 - Sensors and Actuators: A.Physical
T1 - Experimental determination of silicon pressure sensor diaphragm deflection
VL - 24
IS - 3
SP - 175
EP - 179
DO - 10.1016/0924-4247(90)80053-8
ER -
@article{
author = "Đurić, Zoran G. and Matić, Milan J. and Matović, Jovan and Petrović, Radomir and Simičić, Nevenka",
year = "1990",
url = "https://cer.ihtm.bg.ac.rs/handle/123456789/4457",
abstract = "A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.",
publisher = "Elsevier",
journal = "Sensors and Actuators: A.Physical",
title = "Experimental determination of silicon pressure sensor diaphragm deflection",
volume = "24",
number = "3",
pages = "175-179",
doi = "10.1016/0924-4247(90)80053-8"
}
Đurić, Z. G., Matić, M. J., Matović, J., Petrović, R.,& Simičić, N. (1990). Experimental determination of silicon pressure sensor diaphragm deflection.
Sensors and Actuators: A.Physical
Elsevier., 24(3), 175-179.
https://doi.org/10.1016/0924-4247(90)80053-8
Đurić ZG, Matić MJ, Matović J, Petrović R, Simičić N. Experimental determination of silicon pressure sensor diaphragm deflection. Sensors and Actuators: A.Physical. 1990;24(3):175-179
Đurić Zoran G., Matić Milan J., Matović Jovan, Petrović Radomir, Simičić Nevenka, "Experimental determination of silicon pressure sensor diaphragm deflection" Sensors and Actuators: A.Physical, 24, no. 3 (1990):175-179,
https://doi.org/10.1016/0924-4247(90)80053-8 .
