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Experimental determination of silicon pressure sensor diaphragm deflection

Authorized Users Only
1990
Authors
Đurić, Zoran G.
Matić, Milan J.
Matović, Jovan
Petrović, Radomir
Simičić, Nevenka
Article (Published version)
Metadata
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Abstract
A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.
Keywords:
silicon / Pressure Transducers / Pressure Sensors / Semiconductor Devices--Diaphragms / Semiconducting Silicon
Source:
Sensors and Actuators: A.Physical, 1990, 24, 3, 175-179
Publisher:
  • Elsevier

DOI: 10.1016/0924-4247(90)80053-8

ISSN: 0924-4247

Scopus: 2-s2.0-0025488617
[ Google Scholar ]
10
URI
https://cer.ihtm.bg.ac.rs/handle/123456789/4457
Collections
  • Radovi istraživača / Researchers' publications
Institution/Community
IHTM
TY  - JOUR
AU  - Đurić, Zoran G.
AU  - Matić, Milan J.
AU  - Matović, Jovan
AU  - Petrović, Radomir
AU  - Simičić, Nevenka
PY  - 1990
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4457
AB  - A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.
PB  - Elsevier
T2  - Sensors and Actuators: A.Physical
T1  - Experimental determination of silicon pressure sensor diaphragm deflection
VL  - 24
IS  - 3
SP  - 175
EP  - 179
DO  - 10.1016/0924-4247(90)80053-8
ER  - 
@article{
author = "Đurić, Zoran G. and Matić, Milan J. and Matović, Jovan and Petrović, Radomir and Simičić, Nevenka",
year = "1990",
abstract = "A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.",
publisher = "Elsevier",
journal = "Sensors and Actuators: A.Physical",
title = "Experimental determination of silicon pressure sensor diaphragm deflection",
volume = "24",
number = "3",
pages = "175-179",
doi = "10.1016/0924-4247(90)80053-8"
}
Đurić, Z. G., Matić, M. J., Matović, J., Petrović, R.,& Simičić, N.. (1990). Experimental determination of silicon pressure sensor diaphragm deflection. in Sensors and Actuators: A.Physical
Elsevier., 24(3), 175-179.
https://doi.org/10.1016/0924-4247(90)80053-8
Đurić ZG, Matić MJ, Matović J, Petrović R, Simičić N. Experimental determination of silicon pressure sensor diaphragm deflection. in Sensors and Actuators: A.Physical. 1990;24(3):175-179.
doi:10.1016/0924-4247(90)80053-8 .
Đurić, Zoran G., Matić, Milan J., Matović, Jovan, Petrović, Radomir, Simičić, Nevenka, "Experimental determination of silicon pressure sensor diaphragm deflection" in Sensors and Actuators: A.Physical, 24, no. 3 (1990):175-179,
https://doi.org/10.1016/0924-4247(90)80053-8 . .

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