Приказ основних података о документу
Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
dc.creator | Đinović, Zoran | |
dc.creator | Tomić, Miloš | |
dc.creator | Manojlović, Lazo | |
dc.creator | Lazić, Žarko | |
dc.creator | Smiljanić, Milče M. | |
dc.date.accessioned | 2021-04-14T08:40:27Z | |
dc.date.available | 2021-04-14T08:40:27Z | |
dc.date.issued | 2008 | |
dc.identifier.isbn | 978-953-307-027-8 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/4442 | |
dc.description.abstract | We presented here one contact-less optical technique based on low-coherence interferometry for measurement of thickness and uniformity of Si membranes. We performed a single-mode fiber-optic sensing configuration that is also applicable for the in situ measurement of membrane thickness. Space resolution was defined by diameter of spot of the impinging light of about 20 µm. The accuracy of the technique is about 100 nm. | sr |
dc.language.iso | en | sr |
dc.publisher | IntechOpen | sr |
dc.relation | The Austrian Science Fund (FWF) - the Project L139-N02 “Nanoscale measurement of physical parameters” | sr |
dc.relation | The Integrated Microsystems Austria, IMA GmbH | sr |
dc.rights | openAccess | sr |
dc.rights.uri | https://creativecommons.org/licenses/by-nc-sa/4.0/ | |
dc.source | Micro Electronic and Mechanical Systems | sr |
dc.subject | silicon | sr |
dc.subject | fiber optic sensors | sr |
dc.subject | microelectronics | sr |
dc.subject | Interferometry | sr |
dc.subject | Micro Electronic and Mechanical Systems | sr |
dc.title | Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry | sr |
dc.type | bookPart | sr |
dc.rights.license | BY-NC-SA | sr |
dcterms.abstract | Ђиновић, Зоран В.; Томић, Милош Ц.; Смиљанић, Милче М.; Лазић, Жарко; Манојловић, Лазо Михајло; | |
dc.citation.spage | 51 | |
dc.citation.epage | 60 | |
dc.identifier.doi | 10.5772/7003 | |
dc.identifier.fulltext | https://cer.ihtm.bg.ac.rs/bitstream/id/19818/6623.pdf | |
dc.type.version | publishedVersion | sr |