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dc.creatorĐinović, Zoran
dc.creatorTomić, Miloš
dc.creatorManojlović, Lazo
dc.creatorLazić, Žarko
dc.creatorSmiljanić, Milče M.
dc.date.accessioned2021-04-14T08:40:27Z
dc.date.available2021-04-14T08:40:27Z
dc.date.issued2008
dc.identifier.isbn978-953-307-027-8
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/4442
dc.description.abstractWe presented here one contact-less optical technique based on low-coherence interferometry for measurement of thickness and uniformity of Si membranes. We performed a single-mode fiber-optic sensing configuration that is also applicable for the in situ measurement of membrane thickness. Space resolution was defined by diameter of spot of the impinging light of about 20 µm. The accuracy of the technique is about 100 nm.sr
dc.language.isoensr
dc.publisherIntechOpensr
dc.relationThe Austrian Science Fund (FWF) - the Project L139-N02 “Nanoscale measurement of physical parameters”sr
dc.relationThe Integrated Microsystems Austria, IMA GmbHsr
dc.rightsopenAccesssr
dc.sourceMicro Electronic and Mechanical Systemssr
dc.subjectsiliconsr
dc.subjectfiber optic sensorssr
dc.subjectmicroelectronicssr
dc.subjectInterferometrysr
dc.subjectMicro Electronic and Mechanical Systemssr
dc.titleNon-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometrysr
dc.typebookPartsr
dc.rights.licenseBY-NC-SAsr
dcterms.abstractЂиновић, Зоран В.; Томић, Милош Ц.; Смиљанић, Милче М.; Лазић, Жарко; Манојловић, Лазо Михајло;
dc.citation.spage51
dc.citation.epage60
dc.identifier.doi10.5772/7003
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs/bitstream/id/19818/6623.pdf
dc.type.versionpublishedVersionsr


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