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Analysis of transient adsorption processes using micro/nanocantilever oscillators

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2008
Authors
Đurić, Zoran G.
Jokić, Ivana
Frantlović, Miloš
Article (Published version)
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Abstract
We analyzed the transient in micro/nanocantilever response which begins when adsorption-desorption process starts on the surface of an oscillating cantilever. By solving a differential equation which describes the oscillation of a cantilever affected by time-varying process, we obtained the expression for cantilever response in the time domain, which shows dependence on AD process parameters. We proposed the method for AD process time constant determination, based directly on measurement of oscillating micro/nanocantilever transient response. The method is applicable even in the case of fast changing stimuli acting on the cantilever in the forced oscillation mode. The proposed method can also be utilized in the analysis of other timedependent processes occurring on micro/nanocantilevers.
Keywords:
adsorption-desorption / microcantilever / nanocantilever / mechanical oscillator
Source:
Microelectronic Engineering, 2008, 85, 5-6, 1386-1389
Publisher:
  • Elsevier Science Bv, Amsterdam

DOI: 10.1016/j.mee.2007.12.028

ISSN: 0167-9317

WoS: 000257413400163

Scopus: 2-s2.0-44249096372
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/410
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