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Multipurpose MEMS thermal sensor based on thermopiles
dc.creator | Randjelović, Danijela | |
dc.creator | Petropoulos, Anastasios | |
dc.creator | Kaltsas, Grigoris | |
dc.creator | Stojanovic, Milos | |
dc.creator | Lazić, Žarko | |
dc.creator | Đurić, Zoran G. | |
dc.creator | Matic, Milan | |
dc.date.accessioned | 2019-01-30T17:17:26Z | |
dc.date.available | 2019-01-30T17:17:26Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0924-4247 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/401 | |
dc.description.abstract | This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors. | en |
dc.publisher | Elsevier Science Sa, Lausanne | |
dc.rights | restrictedAccess | |
dc.source | Sensors and Actuators, A: Physical | |
dc.subject | thermopile | en |
dc.subject | micromachining | en |
dc.subject | analytical and FEA modelling | en |
dc.subject | thermal converter | en |
dc.subject | flow meter | en |
dc.subject | vacuum detector | en |
dc.title | Multipurpose MEMS thermal sensor based on thermopiles | en |
dc.type | article | |
dc.rights.license | ARR | |
dcterms.abstract | Лазић, Жарко; Матиц, Милан; Ранђеловић, Данијела; Калтсас, Григорис; Петропоулос, Aнастасиос; Ђурић, Зоран Г.; Стојановиц, Милос; | |
dc.citation.volume | 141 | |
dc.citation.issue | 2 | |
dc.citation.spage | 404 | |
dc.citation.epage | 413 | |
dc.citation.other | 141(2): 404-413 | |
dc.citation.rank | M21 | |
dc.identifier.doi | 10.1016/j.sna.2007.10.043 | |
dc.identifier.scopus | 2-s2.0-38349136201 | |
dc.identifier.wos | 000253734900025 | |
dc.type.version | publishedVersion |