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dc.creatorRanđelović, Danijela
dc.creatorPetropoulos, Anastasios
dc.creatorKaltsas, Grigoris
dc.creatorStojanovic, Milos
dc.creatorLazić, Žarko
dc.creatorĐurić, Zoran G.
dc.creatorMatic, Milan
dc.date.accessioned2019-01-30T17:17:26Z
dc.date.available2019-01-30T17:17:26Z
dc.date.issued2008
dc.identifier.issn0924-4247
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/401
dc.description.abstractThis paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.en
dc.publisherElsevier Science Sa, Lausanne
dc.rightsrestrictedAccess
dc.sourceSensors and Actuators, A: Physical
dc.subjectthermopileen
dc.subjectmicromachiningen
dc.subjectanalytical and FEA modellingen
dc.subjectthermal converteren
dc.subjectflow meteren
dc.subjectvacuum detectoren
dc.titleMultipurpose MEMS thermal sensor based on thermopilesen
dc.typearticle
dc.rights.licenseARR
dcterms.abstractЛазић, Жарко; Матиц, Милан; Ранђеловић, Данијела; Калтсас, Григорис; Петропоулос, Aнастасиос; Ђурић, Зоран Г.; Стојановиц, Милос;
dc.citation.volume141
dc.citation.issue2
dc.citation.spage404
dc.citation.epage413
dc.citation.other141(2): 404-413
dc.citation.rankM21
dc.identifier.doi10.1016/j.sna.2007.10.043
dc.identifier.rcubConv_2385
dc.identifier.scopus2-s2.0-38349136201
dc.identifier.wos000253734900025
dc.type.versionpublishedVersion


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