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Multipurpose MEMS thermal sensor based on thermopiles

Authorized Users Only
2008
Authors
Randjelović, Danijela
Petropoulos, Anastasios
Kaltsas, Grigoris
Stojanovic, Milos
Lazić, Žarko
Đurić, Zoran G.
Matic, Milan
Article (Published version)
Metadata
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Abstract
This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.
Keywords:
thermopile / micromachining / analytical and FEA modelling / thermal converter / flow meter / vacuum detector
Source:
Sensors and Actuators, A: Physical, 2008, 141, 2, 404-413
Publisher:
  • Elsevier Science Sa, Lausanne

DOI: 10.1016/j.sna.2007.10.043

ISSN: 0924-4247

WoS: 000253734900025

Scopus: 2-s2.0-38349136201
[ Google Scholar ]
61
46
URI
https://cer.ihtm.bg.ac.rs/handle/123456789/401
Collections
  • Radovi istraživača / Researchers' publications
Institution/Community
IHTM
TY  - JOUR
AU  - Randjelović, Danijela
AU  - Petropoulos, Anastasios
AU  - Kaltsas, Grigoris
AU  - Stojanovic, Milos
AU  - Lazić, Žarko
AU  - Đurić, Zoran G.
AU  - Matic, Milan
PY  - 2008
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/401
AB  - This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.
PB  - Elsevier Science Sa, Lausanne
T2  - Sensors and Actuators, A: Physical
T1  - Multipurpose MEMS thermal sensor based on thermopiles
VL  - 141
IS  - 2
SP  - 404
EP  - 413
DO  - 10.1016/j.sna.2007.10.043
ER  - 
@article{
author = "Randjelović, Danijela and Petropoulos, Anastasios and Kaltsas, Grigoris and Stojanovic, Milos and Lazić, Žarko and Đurić, Zoran G. and Matic, Milan",
year = "2008",
abstract = "This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.",
publisher = "Elsevier Science Sa, Lausanne",
journal = "Sensors and Actuators, A: Physical",
title = "Multipurpose MEMS thermal sensor based on thermopiles",
volume = "141",
number = "2",
pages = "404-413",
doi = "10.1016/j.sna.2007.10.043"
}
Randjelović, D., Petropoulos, A., Kaltsas, G., Stojanovic, M., Lazić, Ž., Đurić, Z. G.,& Matic, M.. (2008). Multipurpose MEMS thermal sensor based on thermopiles. in Sensors and Actuators, A: Physical
Elsevier Science Sa, Lausanne., 141(2), 404-413.
https://doi.org/10.1016/j.sna.2007.10.043
Randjelović D, Petropoulos A, Kaltsas G, Stojanovic M, Lazić Ž, Đurić ZG, Matic M. Multipurpose MEMS thermal sensor based on thermopiles. in Sensors and Actuators, A: Physical. 2008;141(2):404-413.
doi:10.1016/j.sna.2007.10.043 .
Randjelović, Danijela, Petropoulos, Anastasios, Kaltsas, Grigoris, Stojanovic, Milos, Lazić, Žarko, Đurić, Zoran G., Matic, Milan, "Multipurpose MEMS thermal sensor based on thermopiles" in Sensors and Actuators, A: Physical, 141, no. 2 (2008):404-413,
https://doi.org/10.1016/j.sna.2007.10.043 . .

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