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Multipurpose MEMS thermal sensor based on thermopiles

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2008
Authors
Ranđelović, Danijela
Petropoulos, Anastasios
Kaltsas, Grigoris
Stojanovic, Milos
Lazić, Žarko
Đurić, Zoran G.
Matic, Milan
Article (Published version)
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Abstract
This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.
Keywords:
thermopile / micromachining / analytical and FEA modelling / thermal converter / flow meter / vacuum detector
Source:
Sensors and Actuators, A: Physical, 2008, 141, 2, 404-413
Publisher:
  • Elsevier Science Sa, Lausanne

DOI: 10.1016/j.sna.2007.10.043

ISSN: 0924-4247

WoS: 000253734900025

Scopus: 2-s2.0-38349136201
[ Google Scholar ]
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/401
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Institution
IHTM

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