Multipurpose MEMS thermal sensor based on thermopiles
Authorized Users Only
2008
Authors
Ranđelović, Danijela
Petropoulos, Anastasios
Kaltsas, Grigoris
Stojanovic, Milos
Lazić, Žarko

Đurić, Zoran G.

Matic, Milan
Article (Published version)

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Show full item recordAbstract
This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.
Keywords:
thermopile / micromachining / analytical and FEA modelling / thermal converter / flow meter / vacuum detectorSource:
Sensors and Actuators, A: Physical, 2008, 141, 2, 404-413Publisher:
- Elsevier Science Sa, Lausanne
DOI: 10.1016/j.sna.2007.10.043
ISSN: 0924-4247