A consideration of the use of ICTM SP-12 pressure sensor for ultrasound sensing

Abstract

A consideration study for the application of the pressure sensor SP-12 developed and produced by ICTM CMT as an ultrasound sensor is given. The interaction of ultrasound with the sensor’s membrane was analytically described, but for the initial examination of its performance, Finite Elements Method simulation was applied. The sensor SP-12 has eigenfrequencies in the range from 200 kHz to the frequencies higher than 2 MHz. The amplitude of the output signal, which is proportional to Von Mises stress, is highest for the lowest frequency, and it exponentially decreases as the eigenfrequencies increase. This makes the sensor suitable for the ultrasound measurements in the range of hundreds of kHz