Приказ основних података о документу

dc.creatorSmiljanić, Milče M.
dc.creatorLazić, Žarko
dc.creatorRašljić Rafajilović, Milena
dc.creatorCvetanović Zobenica, Katarina
dc.creatorMilinković, Evgenija
dc.creatorFilipović, Ana
dc.date.accessioned2020-12-09T14:43:48Z
dc.date.available2021-12-04
dc.date.issued2020
dc.identifier.issn0960-1317
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/4002
dc.description.abstractIn this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.en
dc.language.isoensr
dc.publisherIOP Publishingsr
dc.relationinfo:eu-repo/grantAgreement/MESTD/inst-2020/200026/RS//sr
dc.rightsembargoedAccesssr
dc.rights.urihttps://creativecommons.org/licenses/by-nc-nd/4.0/
dc.sourceJournal of Micromechanics and Microengineeringsr
dc.subjectY bifurcationsr
dc.subjectmicrochannelssr
dc.subjectsiliconsr
dc.subjectwet etchingsr
dc.subjectTMAHsr
dc.titleSilicon Y-bifurcated microchannels etched in 25 wt% TMAH water solutionen
dc.typearticlesr
dc.rights.licenseBY-NC-NDsr
dcterms.abstractФилиповић, Aна; Смиљанић, Милче М.; Лазић, Жарко; Милинковић, Евгенија; Цветановић Зобеница, Катарина; Рашљић Рафајиловић, Милена;
dc.citation.volume31
dc.citation.spage017001
dc.citation.rankM22~
dc.description.otherThis is the peer-reviewed version of the article: Milče M Smiljanić, Žarko Lazić, Milena Rašljić Rafajilović, Katarina Cvetanović Zobenica, Evgenija Milinković and Ana Filipović, J. Micromech. Microeng. 31 017001, DOI: [https://doi.org/10.1088/1361-6439/abcb67]
dc.description.otherThe published version [https://cer.ihtm.bg.ac.rs/handle/123456789/4003]
dc.identifier.doi10.1088/1361-6439/abcb67
dc.identifier.fulltexthttp://cer.ihtm.bg.ac.rs/bitstream/id/18420/Smiljanic+et+al_2020_J._Micromech._Microeng._10.1088_1361-6439_abcb67.pdf
dc.identifier.scopus2-s2.0-85097922064
dc.identifier.wos000596723900001
dc.type.versionacceptedVersionsr


Документи

Thumbnail

Овај документ се појављује у следећим колекцијама

Приказ основних података о документу