A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors

Abstract

In order to improve the efficiency of the pressure sensors characterization process at the Center of Microelectronic Technologies (CMT), a new measurement setup is developed that enables fully automatic characterization of multiple silicon piezoresistive MEMS pressure sensors. The whole experiment, including high-performance measurement of sensors output signals at several temperature and pressure values, and storage of the measured results in a computer file, requires only a minimum of operator action. The setup consists of both hardware and software modules. The hardware is partly based on equipment designed and built at CMT for this purpose, and the software is entirely developed at CMT. This paper is focused on the software aspects of the developed experimental setup. The main objective of the presented work is to make the small series production of industrial pressure transmitters at CMT more efficient. The results are also very useful for research and development of pressure sensors and instrumentation.