In order to improve the efficiency of the pressure sensors characterization process at the Center of Microelectronic Technologies (CMT), a new measurement setup is developed that enables fully automatic characterization of multiple silicon piezoresistive MEMS pressure sensors. The whole experiment, including high-performance measurement of sensors output signals at several temperature and pressure values, and storage of the measured results in a computer file, requires only a minimum of operator action. The setup consists of both hardware and software modules. The hardware is partly based on equipment designed and built at CMT for this purpose, and the software is entirely developed at CMT. This paper is focused on the software aspects of the developed experimental setup. The main objective of the presented work is to make the small series production of industrial pressure transmitters at CMT more efficient. The results are also very useful for research and development of pressure sens...ors and instrumentation.
Keywords:
Sensor / pressure / software / measurement
Source:
Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia, 2017, MOI2.2-1-MOI2.2-5
TY - CONF
AU - Poljak, Predrag
AU - Frantlović, Miloš
AU - Vukelić, Branko
AU - Randjelović, Danijela
AU - Vorkapić, Miloš
AU - Vasiljević-Radović, Dana
PY - 2017
UR - http://etran.etf.rs/index_e.html
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/3902
AB - In order to improve the efficiency of the pressure sensors characterization process at the Center of Microelectronic Technologies (CMT), a new measurement setup is developed that enables fully automatic characterization of multiple silicon piezoresistive MEMS pressure sensors. The whole experiment, including high-performance measurement of sensors output signals at several temperature and pressure values, and storage of the measured results in a computer file, requires only a minimum of operator action. The setup consists of both hardware and software modules. The hardware is partly based on equipment designed and built at CMT for this purpose, and the software is entirely developed at CMT. This paper is focused on the software aspects of the developed experimental setup. The main objective of the presented work is to make the small series production of industrial pressure transmitters at CMT more efficient. The results are also very useful for research and development of pressure sensors and instrumentation.
PB - Beograd : Društvo za ETRAN
PB - Beograd : Akademska misao
C3 - Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia
T1 - A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors
SP - MOI2.2-1
EP - MOI2.2-5
UR - https://hdl.handle.net/21.15107/rcub_cer_3902
ER -
@conference{
author = "Poljak, Predrag and Frantlović, Miloš and Vukelić, Branko and Randjelović, Danijela and Vorkapić, Miloš and Vasiljević-Radović, Dana",
year = "2017",
abstract = "In order to improve the efficiency of the pressure sensors characterization process at the Center of Microelectronic Technologies (CMT), a new measurement setup is developed that enables fully automatic characterization of multiple silicon piezoresistive MEMS pressure sensors. The whole experiment, including high-performance measurement of sensors output signals at several temperature and pressure values, and storage of the measured results in a computer file, requires only a minimum of operator action. The setup consists of both hardware and software modules. The hardware is partly based on equipment designed and built at CMT for this purpose, and the software is entirely developed at CMT. This paper is focused on the software aspects of the developed experimental setup. The main objective of the presented work is to make the small series production of industrial pressure transmitters at CMT more efficient. The results are also very useful for research and development of pressure sensors and instrumentation.",
publisher = "Beograd : Društvo za ETRAN, Beograd : Akademska misao",
journal = "Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia",
title = "A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors",
pages = "MOI2.2-1-MOI2.2-5",
url = "https://hdl.handle.net/21.15107/rcub_cer_3902"
}
Poljak, P., Frantlović, M., Vukelić, B., Randjelović, D., Vorkapić, M.,& Vasiljević-Radović, D.. (2017). A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors. in Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia
Beograd : Društvo za ETRAN., MOI2.2-1-MOI2.2-5.
https://hdl.handle.net/21.15107/rcub_cer_3902
Poljak P, Frantlović M, Vukelić B, Randjelović D, Vorkapić M, Vasiljević-Radović D. A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors. in Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia. 2017;:MOI2.2-1-MOI2.2-5.
https://hdl.handle.net/21.15107/rcub_cer_3902 .
Poljak, Predrag, Frantlović, Miloš, Vukelić, Branko, Randjelović, Danijela, Vorkapić, Miloš, Vasiljević-Radović, Dana, "A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors" in Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia (2017):MOI2.2-1-MOI2.2-5,
https://hdl.handle.net/21.15107/rcub_cer_3902 .
