A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors
Authors
Poljak, Predrag
Frantlović, Miloš

Vukelić, Branko

Randjelović, Danijela

Vorkapić, Miloš

Vasiljević-Radović, Dana

Conference object (Published version)
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In order to improve the efficiency of the pressure sensors characterization process at the Center of Microelectronic Technologies (CMT), a new measurement setup is developed that enables fully automatic characterization of multiple silicon piezoresistive MEMS pressure sensors. The whole experiment, including high-performance measurement of sensors output signals at several temperature and pressure values, and storage of the measured results in a computer file, requires only a minimum of operator action. The setup consists of both hardware and software modules. The hardware is partly based on equipment designed and built at CMT for this purpose, and the software is entirely developed at CMT. This paper is focused on the software aspects of the developed experimental setup. The main objective of the presented work is to make the small series production of industrial pressure transmitters at CMT more efficient. The results are also very useful for research and development of pressure sens...ors and instrumentation.
Keywords:
Sensor / pressure / software / measurementSource:
Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia, 2017, MOI2.2-1-MOI2.2-5Publisher:
- Beograd : Društvo za ETRAN
- Beograd : Akademska misao
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Measurements in a smart grid concept (RS-32019)
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IHTMTY - CONF AU - Poljak, Predrag AU - Frantlović, Miloš AU - Vukelić, Branko AU - Randjelović, Danijela AU - Vorkapić, Miloš AU - Vasiljević-Radović, Dana PY - 2017 UR - http://etran.etf.rs/index_e.html UR - https://cer.ihtm.bg.ac.rs/handle/123456789/3902 AB - In order to improve the efficiency of the pressure sensors characterization process at the Center of Microelectronic Technologies (CMT), a new measurement setup is developed that enables fully automatic characterization of multiple silicon piezoresistive MEMS pressure sensors. The whole experiment, including high-performance measurement of sensors output signals at several temperature and pressure values, and storage of the measured results in a computer file, requires only a minimum of operator action. The setup consists of both hardware and software modules. The hardware is partly based on equipment designed and built at CMT for this purpose, and the software is entirely developed at CMT. This paper is focused on the software aspects of the developed experimental setup. The main objective of the presented work is to make the small series production of industrial pressure transmitters at CMT more efficient. The results are also very useful for research and development of pressure sensors and instrumentation. PB - Beograd : Društvo za ETRAN PB - Beograd : Akademska misao C3 - Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia T1 - A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors SP - MOI2.2-1 EP - MOI2.2-5 UR - https://hdl.handle.net/21.15107/rcub_cer_3902 ER -
@conference{ author = "Poljak, Predrag and Frantlović, Miloš and Vukelić, Branko and Randjelović, Danijela and Vorkapić, Miloš and Vasiljević-Radović, Dana", year = "2017", abstract = "In order to improve the efficiency of the pressure sensors characterization process at the Center of Microelectronic Technologies (CMT), a new measurement setup is developed that enables fully automatic characterization of multiple silicon piezoresistive MEMS pressure sensors. The whole experiment, including high-performance measurement of sensors output signals at several temperature and pressure values, and storage of the measured results in a computer file, requires only a minimum of operator action. The setup consists of both hardware and software modules. The hardware is partly based on equipment designed and built at CMT for this purpose, and the software is entirely developed at CMT. This paper is focused on the software aspects of the developed experimental setup. The main objective of the presented work is to make the small series production of industrial pressure transmitters at CMT more efficient. The results are also very useful for research and development of pressure sensors and instrumentation.", publisher = "Beograd : Društvo za ETRAN, Beograd : Akademska misao", journal = "Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia", title = "A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors", pages = "MOI2.2-1-MOI2.2-5", url = "https://hdl.handle.net/21.15107/rcub_cer_3902" }
Poljak, P., Frantlović, M., Vukelić, B., Randjelović, D., Vorkapić, M.,& Vasiljević-Radović, D.. (2017). A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors. in Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia Beograd : Društvo za ETRAN., MOI2.2-1-MOI2.2-5. https://hdl.handle.net/21.15107/rcub_cer_3902
Poljak P, Frantlović M, Vukelić B, Randjelović D, Vorkapić M, Vasiljević-Radović D. A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors. in Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia. 2017;:MOI2.2-1-MOI2.2-5. https://hdl.handle.net/21.15107/rcub_cer_3902 .
Poljak, Predrag, Frantlović, Miloš, Vukelić, Branko, Randjelović, Danijela, Vorkapić, Miloš, Vasiljević-Radović, Dana, "A Software Application for Automatic Characterization of Piezoresistive MEMS Pressure Sensors" in Proceedings of 4th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2017, June 5-8, Kladovo, Serbia (2017):MOI2.2-1-MOI2.2-5, https://hdl.handle.net/21.15107/rcub_cer_3902 .