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dc.creatorRanđelović, Danijela
dc.creatorJovanov, V.
dc.creatorLazić, Žarko
dc.creatorĐurić, Zoran G.
dc.creatorMatic, A.
dc.date.accessioned2019-01-30T17:16:59Z
dc.date.available2019-01-30T17:16:59Z
dc.date.issued2008
dc.identifier.issn2159-1660
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/381
dc.description.abstractThis paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.rightsrestrictedAccess
dc.source26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
dc.titleVacuum MEMS sensor based on thermopiles - Simple model and experimental resultsen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractМатиц, A.; Лазић, Жарко; Јованов, В.; Ранђеловић, Данијела; Ђурић, Зоран Г.;
dc.citation.spage367
dc.citation.epage370
dc.citation.other: 367-370
dc.identifier.doi10.1109/ICMEL.2008.4559298
dc.identifier.rcubConv_2409
dc.identifier.scopus2-s2.0-51749124672
dc.identifier.wos000257432600076
dc.type.versionpublishedVersion


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