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Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
| dc.creator | Randjelović, Danijela | |
| dc.creator | Jovanov, Vladislav | |
| dc.creator | Lazić, Žarko | |
| dc.creator | Đurić, Zoran G. | |
| dc.creator | Matic, A. | |
| dc.date.accessioned | 2019-01-30T17:16:59Z | |
| dc.date.available | 2019-01-30T17:16:59Z | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 2159-1660 | |
| dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/381 | |
| dc.description.abstract | This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions. | en |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc. | |
| dc.rights | restrictedAccess | |
| dc.source | 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings | |
| dc.title | Vacuum MEMS sensor based on thermopiles - Simple model and experimental results | en |
| dc.type | conferenceObject | |
| dc.rights.license | ARR | |
| dcterms.abstract | Матиц, A.; Лазић, Жарко; Јованов, В.; Ранђеловић, Данијела; Ђурић, Зоран Г.; | |
| dc.citation.spage | 367 | |
| dc.citation.epage | 370 | |
| dc.citation.other | : 367-370 | |
| dc.identifier.doi | 10.1109/ICMEL.2008.4559298 | |
| dc.identifier.scopus | 2-s2.0-51749124672 | |
| dc.identifier.wos | 000257432600076 | |
| dc.type.version | publishedVersion |
