Thin-film four-resistor temperature sensor for measurements in air
Само за регистроване кориснике
2019
Аутори
Sarajlić, MilijaFrantlović, Miloš
Smiljanić, Milče
Rašljić, Milena
Cvetanović Zobenica, Katarina
Lazić, Žarko
Vasiljević-Radović, Dana
Чланак у часопису (Објављена верзија)
,
IOP Publishing
Метаподаци
Приказ свих података о документуАпстракт
A temperature sensor based on four thin-film resistors is presented. Four resistors are made in the form of thin metal layer meanders on the surface of a silicon chip. Two resistors are covered with a layer of 2.3 µm thick hard baked photoresist. Two other resistors are exposed to ambient air. The photoresist cover on two of the resistors makes a mismatch in the temperature coefficient of resistance between the covered and exposed resistors, thus enabling functionality of the system as a temperature sensor. The resistors are connected in the Wheatstone bridge configuration in order to enhance the sensitivity of the structure. Resistor meanders are 500 µm × 500 µm in lateral dimensions, each consisting of a 10 µm wide metal strip with 10 µm clearance between the strips. The total length of each strip is 12.5 mm. The material used for the meanders is 100 nm thick sputtered gold. The sensor was tested in a temperature chamber in the range from 80 °C to −50 °C. The matching between the ...sensor's output and the readings obtained by the Pt1000 reference sensor was within ±0.1 °C (static), but the influence of water vapor adsorption at the exposed resistors surface on temperature measurements was visible. The sensor has potential applications in temperature measurements in air.
Кључне речи:
resistance temperature detector / thin film resistor / Wheatstone bridge / temperature sensor / air temperature / modified TCRИзвор:
Measurement Science and Technology, 2019, 30, 11, 115102-Издавач:
- IOP Publishing
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
DOI: 10.1088/1361-6501/ab326c
ISSN: 0957-0233; 1361-6501
WoS: 000484512100001
Scopus: 2-s2.0-85072729919
Институција/група
IHTMTY - JOUR AU - Sarajlić, Milija AU - Frantlović, Miloš AU - Smiljanić, Milče AU - Rašljić, Milena AU - Cvetanović Zobenica, Katarina AU - Lazić, Žarko AU - Vasiljević-Radović, Dana PY - 2019 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/3251 AB - A temperature sensor based on four thin-film resistors is presented. Four resistors are made in the form of thin metal layer meanders on the surface of a silicon chip. Two resistors are covered with a layer of 2.3 µm thick hard baked photoresist. Two other resistors are exposed to ambient air. The photoresist cover on two of the resistors makes a mismatch in the temperature coefficient of resistance between the covered and exposed resistors, thus enabling functionality of the system as a temperature sensor. The resistors are connected in the Wheatstone bridge configuration in order to enhance the sensitivity of the structure. Resistor meanders are 500 µm × 500 µm in lateral dimensions, each consisting of a 10 µm wide metal strip with 10 µm clearance between the strips. The total length of each strip is 12.5 mm. The material used for the meanders is 100 nm thick sputtered gold. The sensor was tested in a temperature chamber in the range from 80 °C to −50 °C. The matching between the sensor's output and the readings obtained by the Pt1000 reference sensor was within ±0.1 °C (static), but the influence of water vapor adsorption at the exposed resistors surface on temperature measurements was visible. The sensor has potential applications in temperature measurements in air. PB - IOP Publishing T2 - Measurement Science and Technology T1 - Thin-film four-resistor temperature sensor for measurements in air VL - 30 IS - 11 SP - 115102 DO - 10.1088/1361-6501/ab326c ER -
@article{ author = "Sarajlić, Milija and Frantlović, Miloš and Smiljanić, Milče and Rašljić, Milena and Cvetanović Zobenica, Katarina and Lazić, Žarko and Vasiljević-Radović, Dana", year = "2019", abstract = "A temperature sensor based on four thin-film resistors is presented. Four resistors are made in the form of thin metal layer meanders on the surface of a silicon chip. Two resistors are covered with a layer of 2.3 µm thick hard baked photoresist. Two other resistors are exposed to ambient air. The photoresist cover on two of the resistors makes a mismatch in the temperature coefficient of resistance between the covered and exposed resistors, thus enabling functionality of the system as a temperature sensor. The resistors are connected in the Wheatstone bridge configuration in order to enhance the sensitivity of the structure. Resistor meanders are 500 µm × 500 µm in lateral dimensions, each consisting of a 10 µm wide metal strip with 10 µm clearance between the strips. The total length of each strip is 12.5 mm. The material used for the meanders is 100 nm thick sputtered gold. The sensor was tested in a temperature chamber in the range from 80 °C to −50 °C. The matching between the sensor's output and the readings obtained by the Pt1000 reference sensor was within ±0.1 °C (static), but the influence of water vapor adsorption at the exposed resistors surface on temperature measurements was visible. The sensor has potential applications in temperature measurements in air.", publisher = "IOP Publishing", journal = "Measurement Science and Technology", title = "Thin-film four-resistor temperature sensor for measurements in air", volume = "30", number = "11", pages = "115102", doi = "10.1088/1361-6501/ab326c" }
Sarajlić, M., Frantlović, M., Smiljanić, M., Rašljić, M., Cvetanović Zobenica, K., Lazić, Ž.,& Vasiljević-Radović, D.. (2019). Thin-film four-resistor temperature sensor for measurements in air. in Measurement Science and Technology IOP Publishing., 30(11), 115102. https://doi.org/10.1088/1361-6501/ab326c
Sarajlić M, Frantlović M, Smiljanić M, Rašljić M, Cvetanović Zobenica K, Lazić Ž, Vasiljević-Radović D. Thin-film four-resistor temperature sensor for measurements in air. in Measurement Science and Technology. 2019;30(11):115102. doi:10.1088/1361-6501/ab326c .
Sarajlić, Milija, Frantlović, Miloš, Smiljanić, Milče, Rašljić, Milena, Cvetanović Zobenica, Katarina, Lazić, Žarko, Vasiljević-Radović, Dana, "Thin-film four-resistor temperature sensor for measurements in air" in Measurement Science and Technology, 30, no. 11 (2019):115102, https://doi.org/10.1088/1361-6501/ab326c . .