Show simple item record

dc.creatorJakšić, Zoran
dc.creatorVasiljević-Radović, Dana
dc.creatorMaksimović, Milan
dc.creatorSarajlić, Milija
dc.creatorVujanić, Aleksandar
dc.creatorĐurić, Zoran G.
dc.date.accessioned2019-12-15T12:11:05Z
dc.date.available2019-12-15T12:11:05Z
dc.date.issued2006
dc.identifier.issn0167-9317
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/3240
dc.description.abstractWe designed and fabricated planar metamaterial ‘particles’ (metasurfaces) intended to achieve negative effective refractive index in mid-infrared. We considered double split ring resonators (negative permeability particles) with additional capacitive gaps to compensate for the inertial inductance, as well as complementary double split rings (negative permittivity). We calculated dispersion relations and considered scaling conditions for our structures. For the fabrication of our experimental samples we used scanning probe nanolithography with z-scanner movement in 20 nm thin silver layers sputtered on positive photoresist or on polycarbonate. The morphology of our structures was characterized by atomic force microscope. We utilized a line width of 80–120 nm and the nanolithographic groove depth in different samples ranged from 4 to 80 nm. We believe our approach could be useful as a simple and low-cost tool for fabrication, assessment and optimization of different metamaterial geometries before larger arrays of particles are fabricated using other, more sophisticated and complex methods.
dc.publisherElsevier BVen
dc.rightsrestrictedAccess
dc.sourceMicroelectronic Engineeringen
dc.subjectNanolithography
dc.subjectNanophotonics
dc.subjectMetamaterials
dc.subjectMesoscopic optics
dc.subjectSubwavelength optics
dc.titleNanofabrication of negative refractive index metasurfacesen
dc.typearticleen
dc.rights.licenseARR
dcterms.abstractВасиљевић-Радовић, Дана; Дјурић, Зоран; Максимовић, Милан; Сарајлић, Милија; Вујанић, Aлександар; Јакшић, Зоран;
dc.citation.volume83
dc.citation.issue4-9
dc.citation.spage1786
dc.citation.epage1791
dc.citation.rankM21
dc.identifier.doi10.1016/j.mee.2006.01.197
dc.identifier.scopus2-s2.0-33646037338
dc.identifier.wos000237581900280
dc.type.versionpublishedVersion


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record