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dc.creatorJakšić, Olga
dc.creatorJokić, Ivana
dc.creatorJakšić, Zoran
dc.creatorObradov, M.
dc.creatorTanasković, Dragan
dc.creatorRandjelović, D.
dc.creatorVasiljević-Radović, Dana
dc.date.accessioned2019-12-15T12:04:14Z
dc.date.available2019-12-15T12:04:14Z
dc.date.issued2019
dc.identifier.isbn978-1-7281-3419-2
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/3239
dc.description.abstractWe address noise and stability of adsorptionbased sensing of ternary gas mixtures in affinity-based MEMS, NEMS and NOEMS sensors. We investigate mechanisms of such chemical sensing in diverse industrial environments where ternary gas mixtures are of importance. In all existing sensing devices signal fluctuations determine their ultimate performance, and in affinity-based nanodevices the prevailing noise is caused by adsorption and desorption of different species at the sensor surface. We consider analytically and numerically detection of three-component gas mixtures. We present results obtained by applying the conventional method for assessing stability of chemical reactions to three component monolayer adsorption. Gas molecules modeling as spherical particles is suitable for applying any model regarding population dynamics, but taking molecular dimension and orientation into account is more realistic. Noise analysis in time and frequency domain is performed for two different classes of ultrahigh sensitivity adsorption based gas sensors: (nano) plasmonic sensors (refractometric devices) and MEMS/NEMS resonator-based devices.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsrestrictedAccess
dc.source2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings
dc.subjectadsorption
dc.subjectdesorption
dc.subjectgas mixtures
dc.subjectgas sensors
dc.subjectmicrosensors
dc.subjectmonolayers
dc.subjectnanophotonics
dc.subjectnanosensors
dc.subjectnumerical analysis
dc.subjectoptical sensors
dc.subjecttime-frequency analysis
dc.titleModeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixturesen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractРандјеловић, Д.; Јакшић, О.; Јакшић, Зоран; Обрадов, М.; Јокић, И.; Васиљевић-Радовић, Дана; Танасковић, Д.;
dc.rights.holderIEEE
dc.citation.spage165
dc.citation.epage168
dc.identifier.doi10.1109/MIEL.2019.8889577
dc.identifier.scopus2-s2.0-85075400605
dc.type.versionpublishedVersion


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