CER - Central Repository
Institute of Chemistry, Technology and Metallurgy
    • English
    • Српски
    • Српски (Serbia)
  • English 
    • English
    • Serbian (Cyrilic)
    • Serbian (Latin)
  • Login
View Item 
  •   Central Repository
  • IHTM
  • Radovi istraživača / Researchers' publications
  • View Item
  •   Central Repository
  • IHTM
  • Radovi istraživača / Researchers' publications
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Photoacoustic spectroscopy: investigation of sputter damage in Si surface by Ar plasma

Authorized Users Only
2004
Authors
Todorović, D. M.
Smiljanić, Miloljub
Sarajlić, Milija
Vasiljević-Radović, Dana
Ranđelović, Danijela
Conference object (Published version)
,
Institute of Electrical and Electronics Engineers
Metadata
Show full item record
Abstract
The effect of Ar plasma etching on the surface of Si was investigated by photoacoustic spectroscopy. The surface of Si sample (p-tip, 10 k/spl Omega/cm, 420 /spl mu/m) was treated with Ar plasma from 2 min to 80 min. Amplitude and phase PA spectra were measured in the energy range from 0.75 to 1.55 eV. The amplitude ratio and phase difference of photoacoustic signals of Si samples Ar plasma etched and incoming Si samples indicate existence of two surface energy states (the generation-recombination centers) at 0.31 and 0.99 eV.
Source:
Proceedings - 2004 24th International Conference on Microelectronics, MIEL 2004, 2004, 2, 429-432
Publisher:
  • Institute of Electrical and Electronics Engineers (IEEE)
Note:
  • 24th International Conference on Microelectronics, MIEL 2004; Nis; Yugoslavia; 16 May 2004 through 19 May 2004

DOI: 10.1109/ICMEL.2004.1314853

Scopus: 2-s2.0-3142750513
[ Google Scholar ]
URI
http://cer.ihtm.bg.ac.rs/handle/123456789/3088
Collections
  • Radovi istraživača / Researchers' publications
Institution
IHTM

DSpace software copyright © 2002-2015  DuraSpace
About CeR – Central Repository | Send Feedback

OpenAIRERCUB
 

 

All of DSpaceInstitutionsAuthorsTitlesSubjectsThis institutionAuthorsTitlesSubjects

Statistics

View Usage Statistics

DSpace software copyright © 2002-2015  DuraSpace
About CeR – Central Repository | Send Feedback

OpenAIRERCUB