CER - Central Repository
Institute of Chemistry, Technology and Metallurgy
    • English
    • Српски
    • Српски (Serbia)
  • English 
    • English
    • Serbian (Cyrillic)
    • Serbian (Latin)
  • Login
View Item 
  •   CER
  • IHTM
  • Radovi istraživača / Researchers' publications
  • View Item
  •   CER
  • IHTM
  • Radovi istraživača / Researchers' publications
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

Investigation of SiO/sub 2/ film on Si substrate by photoacoustic method

Authorized Users Only
2004
Authors
Todorović, D. M.
Jović, Vesna
Smiljanić, Miloljub
Conference object (Published version)
,
Institute of Electrical and Electronics Engineers
Metadata
Show full item record
Abstract
The effect of SiO/sub 2/ film on Si substrata (SiO/sub 2//Si) was investigated by photoacoustic spectroscopy. The amplitude and phase spectra were measured and analyzed in dependence on the wavelength of excitation optical beam. The amplitude PA spectra of Si wafer are analogous to the optical absorption spectra. On the other side, the amplitude PA spectra of SiO/sub 2//Si sample show the significant difference. In the energy range above the energy gap of Si, the spectral characteristic has a typical form for optical interference. The phase PA spectra of Si wafer and SiO/sub 2//Si structure are the same in the energy range above the energy gap of Si. In the energy range below the energy gap of Si, the PA spectra of Si wafer and SiO/sub 2//Si structure show the significant difference. The PA signal in this case is the consequence of the electronic states formed on dielectric-semiconductor interface, i.e., the influence of the interface trapped states on the thermal and electronic transp...ort processes in SiO/sub 2//Si junction.

Source:
Proceedings of the International Conference on Microelectronics, 2004, 2, 471-474
Publisher:
  • Institute of Electrical and Electronics Engineers (IEEE)
  • IEEE
Note:
  • Proceedings - 2004 24th International Conference on Microelectronics, MIEL 2004; Nis; Yugoslavia; 16 May 2004 through 19 May 2004;

DOI: 10.1109/ICMEL.2004.1314865

Scopus: 2-s2.0-3142699196
[ Google Scholar ]
URI
https://cer.ihtm.bg.ac.rs/handle/123456789/3086
Collections
  • Radovi istraživača / Researchers' publications
Institution/Community
IHTM
TY  - CONF
AU  - Todorović, D. M.
AU  - Jović, Vesna
AU  - Smiljanić, Miloljub
PY  - 2004
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3086
AB  - The effect of SiO/sub 2/ film on Si substrata (SiO/sub 2//Si) was investigated by photoacoustic spectroscopy. The amplitude and phase spectra were measured and analyzed in dependence on the wavelength of excitation optical beam. The amplitude PA spectra of Si wafer are analogous to the optical absorption spectra. On the other side, the amplitude PA spectra of SiO/sub 2//Si sample show the significant difference. In the energy range above the energy gap of Si, the spectral characteristic has a typical form for optical interference. The phase PA spectra of Si wafer and SiO/sub 2//Si structure are the same in the energy range above the energy gap of Si. In the energy range below the energy gap of Si, the PA spectra of Si wafer and SiO/sub 2//Si structure show the significant difference. The PA signal in this case is the consequence of the electronic states formed on dielectric-semiconductor interface, i.e., the influence of the interface trapped states on the thermal and electronic transport processes in SiO/sub 2//Si junction.
PB  - Institute of Electrical and Electronics Engineers (IEEE)
PB  - IEEE
C3  - Proceedings of the International Conference on Microelectronics
T1  - Investigation of SiO/sub 2/ film on Si substrate by photoacoustic method
VL  - 2
SP  - 471
EP  - 474
DO  - 10.1109/ICMEL.2004.1314865
ER  - 
@conference{
author = "Todorović, D. M. and Jović, Vesna and Smiljanić, Miloljub",
year = "2004",
abstract = "The effect of SiO/sub 2/ film on Si substrata (SiO/sub 2//Si) was investigated by photoacoustic spectroscopy. The amplitude and phase spectra were measured and analyzed in dependence on the wavelength of excitation optical beam. The amplitude PA spectra of Si wafer are analogous to the optical absorption spectra. On the other side, the amplitude PA spectra of SiO/sub 2//Si sample show the significant difference. In the energy range above the energy gap of Si, the spectral characteristic has a typical form for optical interference. The phase PA spectra of Si wafer and SiO/sub 2//Si structure are the same in the energy range above the energy gap of Si. In the energy range below the energy gap of Si, the PA spectra of Si wafer and SiO/sub 2//Si structure show the significant difference. The PA signal in this case is the consequence of the electronic states formed on dielectric-semiconductor interface, i.e., the influence of the interface trapped states on the thermal and electronic transport processes in SiO/sub 2//Si junction.",
publisher = "Institute of Electrical and Electronics Engineers (IEEE), IEEE",
journal = "Proceedings of the International Conference on Microelectronics",
title = "Investigation of SiO/sub 2/ film on Si substrate by photoacoustic method",
volume = "2",
pages = "471-474",
doi = "10.1109/ICMEL.2004.1314865"
}
Todorović, D. M., Jović, V.,& Smiljanić, M.. (2004). Investigation of SiO/sub 2/ film on Si substrate by photoacoustic method. in Proceedings of the International Conference on Microelectronics
Institute of Electrical and Electronics Engineers (IEEE)., 2, 471-474.
https://doi.org/10.1109/ICMEL.2004.1314865
Todorović DM, Jović V, Smiljanić M. Investigation of SiO/sub 2/ film on Si substrate by photoacoustic method. in Proceedings of the International Conference on Microelectronics. 2004;2:471-474.
doi:10.1109/ICMEL.2004.1314865 .
Todorović, D. M., Jović, Vesna, Smiljanić, Miloljub, "Investigation of SiO/sub 2/ film on Si substrate by photoacoustic method" in Proceedings of the International Conference on Microelectronics, 2 (2004):471-474,
https://doi.org/10.1109/ICMEL.2004.1314865 . .

DSpace software copyright © 2002-2015  DuraSpace
About CeR – Central Repository | Send Feedback

re3dataOpenAIRERCUB
 

 

All of DSpaceInstitutions/communitiesAuthorsTitlesSubjectsThis institutionAuthorsTitlesSubjects

Statistics

View Usage Statistics

DSpace software copyright © 2002-2015  DuraSpace
About CeR – Central Repository | Send Feedback

re3dataOpenAIRERCUB