Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method

Todorović, D. M.; Smiljanić, Miloljub

doi:10.1063/1.1523132

Samo za registrovane korisnike

2003

Autori

Todorović, D. M.
Smiljanić, Miloljub

Konferencijski prilog (Objavljena verzija)

American Institute of Physics

Metapodaci

Prikaz svih podataka o dokumentu

Apstrakt

The spectral and dynamic characteristics of surface energy states (SES) on a Si wafer are investigated by photoacoustic (PA) spectroscopy. The PA spectra were measured as a function of the wavelength and modulation frequency of the excitation optical beam by the PA spectrometer. The PA amplitude spectra of Si samples of various surface quality were studied at room temperature in the spectral range of the excitation optical energy beam from 0.7 to 1.5 eV and for various modulation frequencies. The difference in PA amplitude spectra of an as-received Si wafer and a Si wafer with a mechanically roughened surface for various modulation frequencies indicates the energy distribution and the dynamics of the SES. A change in the PA amplitude signal for various modulation frequencies indicates the temporal distribution of the SES for a fixed energy of excitation.

Izvor:
Review of Scientific Instruments, 2003, 74, 1, 747-749

Izdavač:

AIP Publishing

Finansiranje / projekti:

Ministry of Sciences, Tecnologies, and Development, Republic of Serbia, Grant No. I.T.1.04.0062.B

Napomena:

Conference: 12th International Conference on Photoacoustic and Photothermal Phenomena (12 ICPPP) Location: Toronto, Canada; Date: JUN 24-27, 2002

DOI: 10.1063/1.1523132

ISSN: 0034-6748; 1089-7623

WoS: 000180451900134

Scopus: 2-s2.0-0037280509

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	11

TY  - CONF
AU  - Todorović, D. M.
AU  - Smiljanić, Miloljub
PY  - 2003
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3083
AB  - The spectral and dynamic characteristics of surface energy states (SES) on a Si wafer are investigated by photoacoustic (PA) spectroscopy. The PA spectra were measured as a function of the wavelength and modulation frequency of the excitation optical beam by the PA spectrometer. The PA amplitude spectra of Si samples of various surface quality were studied at room temperature in the spectral range of the excitation optical energy beam from 0.7 to 1.5 eV and for various modulation frequencies. The difference in PA amplitude spectra of an as-received Si wafer and a Si wafer with a mechanically roughened surface for various modulation frequencies indicates the energy distribution and the dynamics of the SES. A change in the PA amplitude signal for various modulation frequencies indicates the temporal distribution of the SES for a fixed energy of excitation.
PB  - AIP Publishing
C3  - Review of Scientific Instruments
T1  - Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method
VL  - 74
IS  - 1
SP  - 747
EP  - 749
DO  - 10.1063/1.1523132
ER  -

@conference{
author = "Todorović, D. M. and Smiljanić, Miloljub",
year = "2003",
abstract = "The spectral and dynamic characteristics of surface energy states (SES) on a Si wafer are investigated by photoacoustic (PA) spectroscopy. The PA spectra were measured as a function of the wavelength and modulation frequency of the excitation optical beam by the PA spectrometer. The PA amplitude spectra of Si samples of various surface quality were studied at room temperature in the spectral range of the excitation optical energy beam from 0.7 to 1.5 eV and for various modulation frequencies. The difference in PA amplitude spectra of an as-received Si wafer and a Si wafer with a mechanically roughened surface for various modulation frequencies indicates the energy distribution and the dynamics of the SES. A change in the PA amplitude signal for various modulation frequencies indicates the temporal distribution of the SES for a fixed energy of excitation.",
publisher = "AIP Publishing",
journal = "Review of Scientific Instruments",
title = "Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method",
volume = "74",
number = "1",
pages = "747-749",
doi = "10.1063/1.1523132"
}

Todorović, D. M.,& Smiljanić, M.. (2003). Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method. in Review of Scientific Instruments
AIP Publishing., 74(1), 747-749.
https://doi.org/10.1063/1.1523132

Todorović DM, Smiljanić M. Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method. in Review of Scientific Instruments. 2003;74(1):747-749.
doi:10.1063/1.1523132 .

Todorović, D. M., Smiljanić, Miloljub, "Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method" in Review of Scientific Instruments, 74, no. 1 (2003):747-749,
https://doi.org/10.1063/1.1523132 . .