Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method
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2003
Conference object (Published version)

American Institute of Physics
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The spectral and dynamic characteristics of surface energy states (SES) on a Si wafer are investigated by photoacoustic (PA) spectroscopy. The PA spectra were measured as a function of the wavelength and modulation frequency of the excitation optical beam by the PA spectrometer. The PA amplitude spectra of Si samples of various surface quality were studied at room temperature in the spectral range of the excitation optical energy beam from 0.7 to 1.5 eV and for various modulation frequencies. The difference in PA amplitude spectra of an as-received Si wafer and a Si wafer with a mechanically roughened surface for various modulation frequencies indicates the energy distribution and the dynamics of the SES. A change in the PA amplitude signal for various modulation frequencies indicates the temporal distribution of the SES for a fixed energy of excitation.
Source:
Review of Scientific Instruments, 2003, 74, 1, 747-749Publisher:
- AIP Publishing
Funding / projects:
- Ministry of Sciences, Tecnologies, and Development, Republic of Serbia, Grant No. I.T.1.04.0062.B
Note:
- Conference: 12th International Conference on Photoacoustic and Photothermal Phenomena (12 ICPPP) Location: Toronto, Canada; Date: JUN 24-27, 2002
DOI: 10.1063/1.1523132
ISSN: 0034-6748; 1089-7623
WoS: 000180451900134
Scopus: 2-s2.0-0037280509
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IHTMTY - CONF AU - Todorović, D. M. AU - Smiljanić, Miloljub PY - 2003 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/3083 AB - The spectral and dynamic characteristics of surface energy states (SES) on a Si wafer are investigated by photoacoustic (PA) spectroscopy. The PA spectra were measured as a function of the wavelength and modulation frequency of the excitation optical beam by the PA spectrometer. The PA amplitude spectra of Si samples of various surface quality were studied at room temperature in the spectral range of the excitation optical energy beam from 0.7 to 1.5 eV and for various modulation frequencies. The difference in PA amplitude spectra of an as-received Si wafer and a Si wafer with a mechanically roughened surface for various modulation frequencies indicates the energy distribution and the dynamics of the SES. A change in the PA amplitude signal for various modulation frequencies indicates the temporal distribution of the SES for a fixed energy of excitation. PB - AIP Publishing C3 - Review of Scientific Instruments T1 - Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method VL - 74 IS - 1 SP - 747 EP - 749 DO - 10.1063/1.1523132 ER -
@conference{ author = "Todorović, D. M. and Smiljanić, Miloljub", year = "2003", abstract = "The spectral and dynamic characteristics of surface energy states (SES) on a Si wafer are investigated by photoacoustic (PA) spectroscopy. The PA spectra were measured as a function of the wavelength and modulation frequency of the excitation optical beam by the PA spectrometer. The PA amplitude spectra of Si samples of various surface quality were studied at room temperature in the spectral range of the excitation optical energy beam from 0.7 to 1.5 eV and for various modulation frequencies. The difference in PA amplitude spectra of an as-received Si wafer and a Si wafer with a mechanically roughened surface for various modulation frequencies indicates the energy distribution and the dynamics of the SES. A change in the PA amplitude signal for various modulation frequencies indicates the temporal distribution of the SES for a fixed energy of excitation.", publisher = "AIP Publishing", journal = "Review of Scientific Instruments", title = "Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method", volume = "74", number = "1", pages = "747-749", doi = "10.1063/1.1523132" }
Todorović, D. M.,& Smiljanić, M.. (2003). Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method. in Review of Scientific Instruments AIP Publishing., 74(1), 747-749. https://doi.org/10.1063/1.1523132
Todorović DM, Smiljanić M. Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method. in Review of Scientific Instruments. 2003;74(1):747-749. doi:10.1063/1.1523132 .
Todorović, D. M., Smiljanić, Miloljub, "Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method" in Review of Scientific Instruments, 74, no. 1 (2003):747-749, https://doi.org/10.1063/1.1523132 . .