Preparation of ZrO2 and Al2O3 thin-films on stainless steel by spray pyrolysis

Abstract

We have investigated the deposition of ZrO2 and Al2O3 films on a stainless steel (SS) substrate by spray pyrolysis method. The ZrO2 films were deposited from aqueous solution of zirconium dinitrate oxide. For Al2O3 films, a boehmite sol was used. The specific surface areas of samples were determined by the BET-method and sample surfaces were characterized by scanning electron microscopy and X-ray photoelectron spectroscopy. The spray pyrolysis method permits the preparation of ZrO2 and Al2O3 thin films on SS with good adhesion. This method enables preparation of oxide layers with relatively high specific surface area, suitable for applications as catalysts supports.