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Hardness and assessment of adhesion of monolayer and multilayer nickel thin films electrochemically deposited on silicon substrates with and without the ultrasonic agitation

Tvrdoća i procena adhezije jednoslojnih i višeslojnih tankih filmova nikla elektrohemijski deponovanih na silicijumskim podlogama sa i bez ultrazvučnog mešanja

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Authors
Lamovec, Jelena
Jović, Vesna
Jaćimovski, Stevo
Jovanov, Goran
Radojević, Vesna
Šetrajčić, Jovan
Article (Published version)
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Abstract
Composite systems of monolayer and multilayer nickel films electrochemically deposited on single crystal (100)-oriented silicon wafers were fabricated with and without the ultrasonic agitation. The hardness and adhesion behaviour of these composite structures were characterized by Vickers microindentation test. The dependence of composite microhardness and film adhesion on the structure of the film and mixing conditions of electrolyte were analysed. Mathematical models of Chicot-Lesage and Chen-Gao were applied to experimental data in order to obtain the film hardness and adhesion parameter respectively. It is confirmed that the mechanical properties of composite systems of nickel thin films on silicon substrate can be enhanced by formation of multilayer film structure by ultrasound-assisted electrodeposition and by reducing the layer thickness in the multilayer film.
Formirani su kompozitni sistemi od jednoslojnih i višeslojnih filmova nikla elektrohemijski deponovanih sa i bez ultrazvučnog mešanja na pločicama od monokristalnog silicijuma orijentacije (100). Tvrdoća i adhezija tih kompozitnih struktura su okarakterisane testom mikrotvrdoće po Vikersu. Analizirana je zavisnost mikrotvrdoće kompozita i adhezije filma od strukture filma i uslova mešanja elektrolita. Matematički modeli Šiko-Lezaža i Čen-Gaoa su primenjeni na eksperimentalne podatke kako bi se dobile vrednosti tvrdoće filma i parametra adhezije. Potvrđeno je da se mehanička svojstva kompozit-nih sistema sastavljenih od tankih filmova nikla na silicijumskoj podlozi mogu poboljšati formiranjem višeslojne strukture filmova, primenom ultrazvučnog mešanja pri elektrodepoziciji i smanjenjem debljine sloja u višeslojnom filmu.
Keywords:
composite hardness / film adhesion / ultrasound-assisted electro-deposition / multilayer nickel films / kompozitna tvrdoća / adhezija filma / ultrazvučno potpomognuta elektrodepozicija / višeslojni film nikla
Source:
NBP : Journal of Criminalistic and Law : Žurnal za kriminalistiku i pravo, 2019, 24, 1, 17-29
Publisher:
  • Belgrade : Academy of Criminalistic and Police Studies
Projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
  • Predefined functional properties polymer composite materials processes and equipment development (RS-34011)
  • info:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/34019/RS/ (RS-34019)

DOI: 10.5937/nabepo24-19682

ISSN: 0354-8872

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URI
http://jakov.kpu.edu.rs/handle/123456789/929
http://cer.ihtm.bg.ac.rs/handle/123456789/2904
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