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dc.creatorDojčinović, I.P.
dc.creatorKuraica, Milorad M.
dc.creatorMitrovi, Ć M.
dc.creatorRanđelović, Danijela
dc.creatorMatić, M.
dc.creatorPuri, Ć J.
dc.date.accessioned2019-01-30T17:14:48Z
dc.date.available2019-01-30T17:14:48Z
dc.date.issued2006
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/277
dc.description.abstractExternal magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy.en
dc.rightsrestrictedAccess
dc.source25th International Conference on Microelectronics, MIEL 2006 - Proceedings
dc.titleMagnetic field influence on silicon surface periodic structures obtained by plasma flow actionen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractРанђеловић, Данијела; Дојчиновић, И.П.; Кураица, М.М.; Митрови, Ћ М.; Матић, М.; Пури, Ћ Ј.;
dc.citation.spage149
dc.citation.epage152
dc.citation.other: 149-152
dc.identifier.doi10.1109/ICMEL.2006.1650916
dc.identifier.rcubConv_4256
dc.identifier.scopus2-s2.0-77956550557
dc.type.versionpublishedVersion


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